Performance of multilayer coatings in relationship to microstructure of metal layers. Characterization and optical properties of Mo/Si multilayers in extreme ultra-violet and x-ray ranges

Journal of Physics Condensed Matter

Volumn 18, Issue 13, 2006, Pages 3355-3365

  Meltchakov, E ^a,c   Vidal, V ^a,d   Faik, H ^a   Casanove, M J ^b   Vidal, B ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b CEMES CNRS   (France)

^c PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

^d AIX MARSEILLE UNIVERSITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSTRUCTURE; MOLYBDENUM; OPTICAL PROPERTIES; SILICON; TRANSMISSION ELECTRON MICROSCOPY; ULTRAVIOLET RADIATION; X RAY DIFFRACTION;

EXTREME ULTRA-VIOLET (EUV); METAL LAYERS; MULTILAYER COATINGS;

MULTILAYERS;

EID: 33645055097     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/18/13/003     Document Type: Article

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