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Volumn 43, Issue 9, 2004, Pages 1835-1848

Experimental comparison of extreme-ultraviolet multilayers for solar physics

Author keywords

[No Author keywords available]

Indexed keywords

ASTROPHYSICS; CALCULATIONS; IONS; MAGNETRON SPUTTERING; OPTICAL FILMS; REFLECTIVE COATINGS; SILICON CARBIDE; THERMODYNAMIC STABILITY; ULTRAVIOLET DEVICES;

EID: 1942487314     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.001835     Document Type: Article
Times cited : (66)

References (24)
  • 1
  • 2
    • 0001055146 scopus 로고
    • Growth of molybdenum on silicon: Structure and interface formation
    • J. M. Slaughter, A. Shapiro, P. A. Kearney, and C. M. Falco,"Growth of molybdenum on silicon: structure and interface formation," Phys. Rev. B 44, 3854-3763 (1991).
    • (1991) Phys. Rev. B , vol.44 , pp. 3854-3763
    • Slaughter, J.M.1    Shapiro, A.2    Kearney, P.A.3    Falco, C.M.4
  • 3
    • 0000375505 scopus 로고
    • Interface imperfections in metal/Si multilayers
    • D. L. Windt, R. Hull, and W. K. Waskiewicz "Interface imperfections in metal/Si multilayers," J. Appl. Phys. 71, 2675-2678 (1992).
    • (1992) J. Appl. Phys. , vol.71 , pp. 2675-2678
    • Windt, D.L.1    Hull, R.2    Waskiewicz, W.K.3
  • 5
    • 0001081549 scopus 로고    scopus 로고
    • C/Si multilayer mirrors for the 25-30 nm wavelength region
    • M. Grigonis and E. J. Knystautas, "C/Si multilayer mirrors for the 25-30 nm wavelength region," Appl. Opt. 36, 2839-2842 (1997).
    • (1997) Appl. Opt. , vol.36 , pp. 2839-2842
    • Grigonis, M.1    Knystautas, E.J.2
  • 6
    • 0000235953 scopus 로고
    • An analysis of the solar extreme-ultraviolet spectrum between 50 and 300 Å
    • M. Malinovsky and L. Heroux, "An analysis of the solar extreme-ultraviolet spectrum between 50 and 300 Å," Astrophys. J. 181, 1009-1030 (1973).
    • (1973) Astrophys. J. , vol.181 , pp. 1009-1030
    • Malinovsky, M.1    Heroux, L.2
  • 7
    • 3643082360 scopus 로고
    • A solar spectral line list between 10 and 200 Å modified for application to high spectral resolution x-ray astronomy
    • G. A. Doschek and R. D. Cowan, "A solar spectral line list between 10 and 200 Å modified for application to high spectral resolution x-ray astronomy," Astrophys. J. Suppl. 56, 67-89 (1984).
    • (1984) Astrophys. J. Suppl. , vol.56 , pp. 67-89
    • Doschek, G.A.1    Cowan, R.D.2
  • 8
    • 33745285024 scopus 로고
    • Extreme ultraviolet spectrum of a solar active region from SERTS
    • R. J. Thomas and W. M. Neupert, "Extreme ultraviolet spectrum of a solar active region from SERTS," Astrophys. J. Suppl. 91, 461-482 (1994).
    • (1994) Astrophys. J. Suppl. , vol.91 , pp. 461-482
    • Thomas, R.J.1    Neupert, W.M.2
  • 11
  • 12
    • 0034427440 scopus 로고    scopus 로고
    • Multilayer grating for the extreme ultraviolet spectrometer (EIS)
    • in X-Ray Optics, Instruments, and Missions IV, R. B. Hoover and A. B. Walker II, eds.
    • J. Seely, "Multilayer grating for the extreme ultraviolet spectrometer (EIS)," in X-Ray Optics, Instruments, and Missions IV, R. B. Hoover and A. B. Walker II, eds., Proc. SPIE 4138, 174-181 (2002).
    • (2002) Proc. SPIE , vol.4138 , pp. 174-181
    • Seely, J.1
  • 13
    • 0001070396 scopus 로고
    • Multilayer facilities required for extreme-ultraviolet lithography
    • D. L. Windt and W. K. Waskiewicz, "Multilayer facilities required for extreme-ultraviolet lithography," J. Vac. Sci. Technol. B 12, 3826-3832 (1994).
    • (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 3826-3832
    • Windt, D.L.1    Waskiewicz, W.K.2
  • 14
    • 0001634592 scopus 로고    scopus 로고
    • IMD - Software for modeling the optical properties of multilayer films
    • D. L. Windt,"IMD - software for modeling the optical properties of multilayer films" Comput. Phys. 12, 360-370 (1998).
    • (1998) Comput. Phys. , vol.12 , pp. 360-370
    • Windt, D.L.1
  • 16
    • 84893987619 scopus 로고    scopus 로고
    • October
    • Solar Orbiter pre-Assessment Study Report, October 1999, http://zeus.nascom.nasa.gov/~bfleck/Orbiter/Documents/pre_assess_rep.pdf.
    • (1999)
  • 17
    • 84893987620 scopus 로고    scopus 로고
    • note
    • These EUV reflectance data were obtained by use of the laser-plasma-based reflectometer described above; in this case no adjustments to the wavelength scales were made.
  • 19
    • 36449006853 scopus 로고
    • Variation in stress with background pressure in sputtered Mo/Si multilayer films
    • D. L. Windt, W. L. Brown, C. A. Volkert, and W. K. Waskiewicz, "Variation in stress with background pressure in sputtered Mo/Si multilayer films," J. Appl. Phys. 78, 2423-2430 (1995).
    • (1995) J. Appl. Phys. , vol.78 , pp. 2423-2430
    • Windt, D.L.1    Brown, W.L.2    Volkert, C.A.3    Waskiewicz, W.K.4
  • 21
    • 0004932883 scopus 로고
    • X-ray interactions: Photabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92
    • B. L. Henke, E. M. Gullikson, and J. C. Davis, "X-ray interactions: photabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92," At. Data Nuclear Data Tables 54, 181-342 (1993).
    • (1993) At. Data Nuclear Data Tables , vol.54 , pp. 181-342
    • Henke, B.L.1    Gullikson, E.M.2    Davis, J.C.3
  • 22
    • 0002970203 scopus 로고    scopus 로고
    • Optical constants of in situ deposited films of important extreme-ultraviolet multilayer mirror materials
    • C. Tarrio, R. N. Watts, T. B. Lucatorto, J. M. Slaughter, and C. M. Falco, "Optical constants of in situ deposited films of important extreme-ultraviolet multilayer mirror materials," App. Opt. 37, 4100-4104 (1998).
    • (1998) App. Opt. , vol.37 , pp. 4100-4104
    • Tarrio, C.1    Watts, R.N.2    Lucatorto, T.B.3    Slaughter, J.M.4    Falco, C.M.5
  • 24
    • 22644451791 scopus 로고    scopus 로고
    • Low-stress W/Cr bilayer films for use as SCALPEL® mask scattering layers
    • D. L. Windt, "Low-stress W/Cr bilayer films for use as SCALPEL® mask scattering layers," J. Vac. Sci. Tech. B 17, 1385-1389 (1999).
    • (1999) J. Vac. Sci. Tech. B , vol.17 , pp. 1385-1389
    • Windt, D.L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.