Strontium niobate high-k dielectrics: Film deposition and material properties

Acta Materialia

Volumn 58, Issue 1, 2010, Pages 216-225

  Hardy, A ^a,b   Van Elshocht, S ^b   Adelmann, C ^b   Kittl, J A ^b   De Gendt, S ^b,c   Heyns, M ^b,c   D'Haen, J ^a,b   D'Olieslaeger, M ^b   Van Bael, M K ^a,b   Van den Rul, H ^a,b   Mullens, J ^a  

^a HASSELT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Deposition; Dielectric constant; Oxides; Sol gel; Thin films

Indexed keywords

ALTERNATIVE GATE DIELECTRICS; CARBONATE CONTENT; CHEMICAL SOLUTION DEPOSITION; CRYSTALLIZATION TEMPERATURE; DIELECTRIC CONSTANT; ENVIRONMENTAL BENEFITS; FILM DEPOSITION; FILM PROPERTIES; HIGH-K DIELECTRIC; HIGH-TEMPERATURE ANNEALING; K-VALUES; MATERIAL PROPERTY; ORGANICS; STRONTIUM NIOBATE; SURFACE SMOOTHNESS; WATER BASED;

CALCINATION; CRYSTALLIZATION; DEPOSITION; DIELECTRIC MATERIALS; GATE DIELECTRICS; GATES (TRANSISTOR); GELATION; GELS; NIOBIUM; NIOBIUM COMPOUNDS; PERMITTIVITY; SILICATES; SOL-GEL PROCESS; SOL-GELS; SOLS; STRONTIUM; ULTRATHIN FILMS;

AMORPHOUS FILMS;

EID: 70449130416     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2009.09.006     Document Type: Article

References (53)

1. Wong H., and Iwai H. Microelectron Eng 83 (2006) 1867
2. .
3. Robertson J. Rep Prog Phys 69 (2006) 327
4. Svensson G., and Eriksson L. J Solid State Chem 114 (1995) 301
5. Weiden M., Grauel A., Norwig J., Horn S., and Steglich F. J Alloy Compd 218 (1995) 13
6. Shoyama M., Tsuzuki A., Kato K., and Murayama N. Appl Phys Lett 75 (1999) 561
7. Okuwada K., Nakamura S., and Nozawa H. J Mater Res 14 (1999) 855
8. Liou Y.C., Shiu W.H., and Shih C.Y. Mater Sci Eng B-Solid State Mater Adv Technol 131 (2006) 142
9. Kamba S., Petzelt J., Buixaderas E., Haubrich D., Vanek P., Kuzel P., et al. J Appl Phys 89 (2001) 3900
10. Lee D., Suh D., Pae Y., Kim H., Cho M.H., and Ko D.H. J Electrochem Soc 154 (2007) H708
11. Katamreddy R., Inman R., Jursich G., Soulet A., and Takoudis C. Acta Mater 56 (2008) 710
12. Adelmann C., Sriramkumar V., Van Elshocht S., Lehnen P., Conard T., and De Gendt S. Appl Phys Lett 91 (2007) 162902
13. Lukosius M.W.C., Pasko S.C.I., Dabrowski J., Sorge R., Mussig H.-J., and Lohe C. IEEE Trans Electron Dev 55 (2008) 2273
14. Silinskas M., Lisker M., Kalkofen B., and Burte E.P. Mater Sci Semicond Process 9 (2006) 1102
15. Levin I., Chan J.Y., Scott J.H., Farber L., Vanderah T.A., and Maslar J.E. J Solid State Chem 166 (2002) 24
16. Lee C.T., Ou C.C., Lin Y.C., Huang C.Y., and Su C.Y. J Eur Ceram Soc 27 (2007) 2273
17. Ratheesh R., Sreemoolanadhan H., and Sebastian M.T. J Solid State Chem 131 (1997) 2
18. Seraji S., Wu Y., Limmer S., Chou T., Nguyen C., Forbess M., et al. Mater Sci Eng B-Solid State Mater Adv Technol 88 (2002) 73
19. Son C.H., Nam H.D., Jang S.W., and Lee H.Y. J Korean Phys Soc 32 (1998) S1434
20. Prasadarao A.V., Selvaraj U., and Komarneni S. J Mater Res 10 (1995) 704
21. Ravi V. Mater Charact 55 (2005) 92
22. Jang B.Y., Kim B.J., Jeong Y.H., Nahm S., Sun H.J., and Lee H.J. J Electroceram 17 (2006) 387
23. Hardy A., Van Elshocht S., Knaepen W., D'Haen J., Conard T., Brijs B., et al. J. Mater. Chem. 19 (2009) 1115
24. Van Elshocht S., Hardy A., Witters T., Adelmann C., Caymax M., Conard T., et al. Electrochem Solid State Lett 10 (2007) G15
25. Hardy A., Van Elshocht S., Adelmann C., Conard T., Franquet A., Douhéret O., et al. Thin Solid Films 516 (2008) 8343
26. Van Elshocht S., Hardy A., Adelmann C., Caymax M., Conard T., Franquet A., et al. J Electrochem Soc 155 (2008) G91
27. Hardy A., Van Elshocht S., D'Haen J., Douheret O., De Gendt S., Adelmann C., et al. J Mater Res 22 (2007) 3484
28. Van den Rul H., Van Bael M.K., Hardy A., Van Werde K., and Mullens J. Aqueous solution based synthesis of nanostructured metal oxides. In: Nalwa H.S., and Tseng T.Y. (Eds). Handbook of nanoceramics and their based nanodevices (2009), American Scientific Publishers
29. Hardy A., D'Haen J., Van den Rul H., Van Bael M.K., and Mullens J. Mater Res Bull 44 (2009) 734
30. Van Bael M.K., Nelis D., Hardy A., Mondelaers D., Van Werde K., D'Haen J., et al. Integr Ferroelectr 45 (2002) 113
31. Bowen D.K., and Tanner B.K. X-ray metrology in semiconductor manufacturing (2006), CRC Press, Taylor & Francis, Boca Raton, FL
32. Wormington M., Panaccione C., Matney K.M., and Bowen D.K. Philos Trans Roy Soc Lond Ser A-Math Phys Eng Sci 357 (1999) 2827
33. Walsh C.B., and Franses E.I. Thin Solid Films 429 (2003) 71
34. Hardy A., D'Haen J., Van den Rul H., Van Bael M.K., and Mullens J. Mater Res Bull 44 (2008) 734
35. Navrotsky A. J Mater Chem 15 (2005) 1883
36. Hardy A., Vanhoyland G., Geuzens E., Van Bael M.K., Mullens J., Van Poucke L.C., et al. J Sol-Gel Sci Technol 33 (2005) 283
37. Miller K.T., Lange F.F., and Marshall D.B. J Mater Res 5 (1990) 151
38. Hardy A., Adelmann C., Van Elshocht S., Van den Rul H., Van Bael M.K., De Gendt S., et al. Appl Surf Sci 255 (2009) 7812
39. Adelmann C., Van Elshocht S., Franquet A., Conard T., Richard O., Bender H., et al. Appl Phys Lett 92 (2008) 112902
40. Van Elshocht S., Adelmann C., Conard T., Delabie A., Franquet A., Nyns L., et al. J Vac Sci Technol A 26 (2008) 724
41. Nyquist R.A., Putzig C.L., and Leugers M.A. Handbook of infrared and Raman spectra of inorganic compounds and organic salts (1997), Academic Press, San Diego, CA
42. Prasetyoko D., Ramli Z., Endud S., and Nur H. Mater Chem Phys 93 (2005) 443
43. Ziolek M., and Nowak I. Catal Today 78 (2003) 543
44. Aronne A., Sigaev V.N., Champagnon B., Fanelli E., Califano V., Usmanova L.Z., et al. J Non-Cryst Solids 351 (2005) 3610
45. Ko Y.S., Jang H.T., and Ahn W.S. J Ind Eng Chem 13 (2007) 764
46. Hardy A, Van Elshocht S, Dewulf D, Clima S, Peys N, Adelmann C, et al. J Electrochem Soc; submitted for publication.
47. Rochat N., Chabli A., Bertin F., Olivier M., Vergnaud C., and Mur P. J Appl Phys 91 (2002) 5029
48. Rojac T., Kosec M., Segedin P., Malic B., and Holc J. Solid State Ionics 177 (2006) 2987
49. Hauser JR, Ahmed K. In: Proceedings of the international conference on characterization and metrology for ULSI technology; 1998. p. 235.
50. Engström O., Raeissi B., Hall S., Buiu O., Lemme M.C., Gottlob H.D.B., et al. Solid-State Electron 51 (2007) 622
51. Busani T., and Devine R.A.B. J Appl Phys 96 (2004) 6642
52. Van Elshocht S., Adelmann C., Clima S., Pourtois G., Conard T., Delabie A., et al. J Vac Sci Technol B 27 (2009) 209
53. JCPDS. Powder diffraction file of inorganic phases; 1997.