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Volumn 19, Issue 8, 2009, Pages 1115-1122

Crystallization resistance of barium titanate zirconate ultrathin films from aqueous CSD: A study of cause and effect

(14) Hardy, An a,b,e Van Elshocht, Sven b Knaepen, Werner c D'Haen, Jan a,b Conard, Thierry b Brijs, Bert b Vandervorst, Wilfred b,d Pourtois, Geoffrey b Kittl, Jorge b Detavernier, Christophe c Heyns, Marc b,d Van Bael, Marlies K a,b Van Den Rul, Heidi a,b Mullens, Jules a

a HASSELT UNIVERSITY (Belgium)

b IMEC (Belgium)

c GHENT UNIVERSITY (Belgium)

d UNIVERSITY OF LEUVEN (Belgium)

e PHL University College (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS FILMS; BARIUM; BARIUM TITANATE; CRYSTALLIZATION; DIELECTRIC MATERIALS; GATE DIELECTRICS; GATES (TRANSISTOR); NANOCRYSTALLINE ALLOYS; OXIDE MINERALS; PEROVSKITE; SILICATES; SILICON COMPOUNDS; SUBSTRATES;

AQUEOUS CHEMICAL SOLUTION DEPOSITIONS; BARIUM TITANATE ZIRCONATE; CRYSTALLIZATION ACTIVATION ENERGIES; CRYSTALLIZATION RESISTANCES; CUBIC PEROVSKITES; HIGH ACTIVATION ENERGIES; HIGH-K GATE DIELECTRICS; K VALUES; SECONDARY PHASE; SI SUBSTRATES; SILICATE FORMATIONS;

ULTRATHIN FILMS;

EID: 59949097596 PISSN: 09599428 EISSN: 13645501 Source Type: Journal
DOI: 10.1039/b816856c Document Type: Article

Times cited : (9)

References (45)

1
- 38749092210
- R. Katamreddy R. Inman G. Jursich A. Soulet C. Takoudis Acta Mater. 2008 56 710 718
- (2008) Acta Mater. , vol.56 , pp. 710-718
- Katamreddy, R.¹ Inman, R.² Jursich, G.³ Soulet, A.⁴ Takoudis, C.⁵

2
- 59949104451
- 032903
- Y. Yamamoto K. Kita K. Kyuno A. Toriumi Appl. Phys. Lett. 2006 89
- (2006) Appl. Phys. Lett. , vol.89
- Yamamoto, Y.¹ Kita, K.² Kyuno, K.³ Toriumi, A.⁴

3
- 40949157023
- 085326
- O. Sharia A. A. Demkov G. Bersuker B. H. Lee Phys. Rev. B 2008 77
- (2008) Phys. Rev. B , vol.77
- Sharia, O.¹ Demkov, A.A.² Bersuker, G.³ Lee, B.H.⁴

4
- 35348909664
- M. Bohr R. Chau T. Ghani K. Mistry IEEE Spectrum 2007 44 29 35
- (2007) IEEE Spectrum , vol.44 , pp. 29-35
- Bohr, M.¹ Chau, R.² Ghani, T.³ Mistry, K.⁴

5
- 32444433098
- T. Matsui Y. Kitano N. Fujimura K. Morii T. Ito Jpn. J. Appl. Phys. - Part 1 2002 41 6639 6642
- (2002) Jpn. J. Appl. Phys. - Part 1 , vol.41 , pp. 6639-6642
- Matsui, T.¹ Kitano, Y.² Fujimura, N.³ Morii, K.⁴ Ito, T.⁵

6
- 0036170565
- A. M. Azad S. Subramaniam Mater. Res. Bull. 2002 37 11 21
- (2002) Mater. Res. Bull. , vol.37 , pp. 11-21
- Azad, A.M.¹ Subramaniam, S.²

7
- 0034187380
- J. Robertson J. Vac. Sci. Tech. B 2000 18 1785 1791
- (2000) J. Vac. Sci. Tech. B , vol.18 , pp. 1785-1791
- Robertson, J.¹

8
- 44649143097
- T. Maiti R. Guo A. S. Bhalla J. Am. Ceram. Soc. 2008 91 1769 1780
- (2008) J. Am. Ceram. Soc. , vol.91 , pp. 1769-1780
- Maiti, T.¹ Guo, R.² Bhalla, A.S.³

9
- 0344432617
- T. Tohma H. Masumoto T. Goto Jpn. J. Appl. Phys. Part 1 2002 41 6643 6646
- (2002) Jpn. J. Appl. Phys. Part 1 , vol.41 , pp. 6643-6646
- Tohma, T.¹ Masumoto, H.² Goto, T.³

10
- 35648999503
- 084106
- X. J. Chou J. W. Zhai H. T. Jiang X. Yao J. Appl. Phys. 2007 102
- (2007) J. Appl. Phys. , vol.102
- Chou, X.J.¹ Zhai, J.W.² Jiang, H.T.³ Yao, X.⁴

11
- 0003998388
- D. R. Lide, Ed. CRC Press
- D. R. Lide, Ed. CRC Handbook of Chemistry and Physics - 83rd edition; CRC Press, 2002-2003
- (2002) CRC Handbook of Chemistry and Physics - 83rd Edition;

12
- 0037417284
- J. Junquera P. Ghosez Nature 2003 422 506 509
- (2003) Nature , vol.422 , pp. 506-509
- Junquera, J.¹ Ghosez, P.²

13
- 2942670851
- D. D. Fong G. B. Stephenson S. K. Streiffer J. A. Eastman O. Auciello P. H. Fuoss C. Thompson Science 2004 304 1650 1653
- (2004) Science , vol.304 , pp. 1650-1653
- Fong, D.D.¹ Stephenson, G.B.² Streiffer, S.K.³ Eastman, J.A.⁴ Auciello, O.⁵ Fuoss, P.H.⁶ Thompson, C.⁷

14
- 29144456398
- M. Dawber K. M. Rabe J. F. Scott Rev. Mod. Phys. 2005 77 1083 1130
- (2005) Rev. Mod. Phys. , vol.77 , pp. 1083-1130
- Dawber, M.¹ Rabe, K.M.² Scott, J.F.³

15
- 49049104932
- Ieee: New York, p 156-157
- P. S. Lysaght, J. C. Woicik, M. A. Sahiner, P. D. Kirsch, G. Bersuker, B. H. Lee, R. Jammy In 2008 International Symposium On Vlsi Technology, Systems And Applications (Vlsi-Tsa), Proceedings Of Technical Program; Ieee: New York, 2008, p 156-157
- (2008) 2008 International Symposium on Vlsi Technology, Systems and Applications (Vlsi-Tsa), Proceedings of Technical Program;
- Lysaght, P.S.¹ Woicik, J.C.² Sahiner, M.A.³ Kirsch, P.D.⁴ Bersuker, G.⁵ Lee, B.H.⁶ Jammy In, R.⁷

16
- 51149085606
- A. Hardy S. Van Elshocht C. Adelmann T. Conard A. Franquet O. Douhéret I. Haeldermans J. D'Haen S. De Gendt M. Caymax M. Heyns M. D'Olieslaeger M. K. Van Bael J. Mullens Thin Solid Films 2008 516 8343 8351
- (2008) Thin Solid Films , vol.516 , pp. 8343-8351
- Hardy, A.¹ Van Elshocht, S.² Adelmann, C.³ Conard, T.⁴ Franquet, A.⁵ Douhéret, O.⁶ Haeldermans, I.⁷ D'Haen, J.⁸ De Gendt, S.⁹ Caymax, M.¹⁰ Heyns, M.¹¹ D'Olieslaeger, M.¹² Van Bael, M.K.¹³ Mullens, J.¹⁴

17
- 40549133529
- S. Van Elshocht A. Hardy C. Adelmann M. Caymax T. Conard A. Franquet O. Richard M. K. Van Bael J. Mullens S. De Gendt J. Electrochem. Soc. 2008 155 G91 G95
- (2008) J. Electrochem. Soc. , vol.155
- Van Elshocht, S.¹ Hardy, A.² Adelmann, C.³ Caymax, M.⁴ Conard, T.⁵ Franquet, A.⁶ Richard, O.⁷ Van Bael, M.K.⁸ Mullens, J.⁹ De Gendt, S.¹⁰

18
- 59949087073
- A. Hardy J. D'Haen H. Van den Rul M. K. Van Bael J. Mullens Mater. Res. Bull. 2008
- (2008) Mater. Res. Bull.
- Hardy, A.¹ D'Haen, J.² Van Den Rul, H.³ Van Bael, M.K.⁴ Mullens, J.⁵

19
- 34848888844
- Joint Committee on Powder Diffraction Standards, Swarthmore, PA
- JCPDS, 1997, Powder diffraction file of inorganic phases, Joint Committee on Powder Diffraction Standards, Swarthmore, PA
- (1997) Powder Diffraction File of Inorganic Phases
- Jcpds¹

20
- 0035270860
- S. M. Haile G. Staneff K. H. Ryu J. Mater. Sci. 2001 36 1149 1160
- (2001) J. Mater. Sci. , vol.36 , pp. 1149-1160
- Haile, S.M.¹ Staneff, G.² Ryu, K.H.³

21
- 4644254426
- J. Wu L. P. Li W. T. P. Espinosa S. T. Haile J. Mater. Res. 2004 19 2366 2376
- (2004) J. Mater. Res. , vol.19 , pp. 2366-2376
- Wu, J.¹ Li, L.P.² Espinosa, W.T.P.³ Haile, S.T.⁴

22
- 0041998010
- R. Platzer R. Schwenker A. Fuessel D. W. Tom J. Tate J. A. Gardner W. E. Evenson J. A. Sommers Hyperfine Interact. 1997 110 271 286
- (1997) Hyperfine Interact. , vol.110 , pp. 271-286
- Platzer, R.¹ Schwenker, R.² Fuessel, A.³ Tom, D.W.⁴ Tate, J.⁵ Gardner, J.A.⁶ Evenson, W.E.⁷ Sommers, J.A.⁸

23
- 0003151063
- C.-J. Kim K.-B. Kim I.-H. Kuk G.-W. Hong Mater. Sci. Engin. B 1996 39 25 33
- (1996) Mater. Sci. Engin. B , vol.39 , pp. 25-33
- Kim, C.-J.¹ Kim, K.-B.² Kuk, I.-H.³ Hong, G.-W.⁴

24
- 28044460545
- V. I. Trofimov I. V. Trofimov J. I. Kim Thin Solid Films 2006 495 398 403
- (2006) Thin Solid Films , vol.495 , pp. 398-403
- Trofimov, V.I.¹ Trofimov, I.V.² Kim, J.I.³

25
- 34548501322
- L. G. A. Marques L. S. Cavalcante A. Z. Simoes F. M. Pontes L. S. Santos-Junior M. Santos I. L. V. Rosa J. A. Varela E. Longo Mater. Chem. Phys. 2007 105 293 297
- (2007) Mater. Chem. Phys. , vol.105 , pp. 293-297
- Marques, L.G.A.¹ Cavalcante, L.S.² Simoes, A.Z.³ Pontes, F.M.⁴ Santos-Junior, L.S.⁵ Santos, M.⁶ Rosa, I.L.V.⁷ Varela, J.A.⁸ Longo, E.⁹

26
- 0346534582
- G. D. Wilk R. M. Wallace J. M. Anthony J. Appl. Phys. 2000 87 484 492
- (2000) J. Appl. Phys. , vol.87 , pp. 484-492
- Wilk, G.D.¹ Wallace, R.M.² Anthony, J.M.³

27
- 18744417292
- R. Lo Nigro R. G. Toro G. Malandrino G. G. Condorelli V. Raineri I. L. Fragala Adv. Funct. Mater. 2005 15 838 845
- (2005) Adv. Funct. Mater. , vol.15 , pp. 838-845
- Lo Nigro, R.¹ Toro, R.G.² Malandrino, G.³ Condorelli, G.G.⁴ Raineri, V.⁵ Fragala, I.L.⁶

28
- 33845384913
- R. Thomas P. Ehrhart M. Luysberg M. Boese R. Waser M. Roeckerath E. Rije J. Schubert S. Van Elshocht M. Caymax Appl. Phys. Lett. 2006 89 232902
- (2006) Appl. Phys. Lett. , vol.89 , pp. 232902
- Thomas, R.¹ Ehrhart, P.² Luysberg, M.³ Boese, M.⁴ Waser, R.⁵ Roeckerath, M.⁶ Rije, E.⁷ Schubert, J.⁸ Van Elshocht, S.⁹ Caymax, M.¹⁰

29
- 41049085342
- C. Adelmann S. Van Elshocht A. Franquet T. Conard O. Richard H. Bender P. Lehnen S. De Gendt Appl. Phys. Lett. 2008 92 112902
- (2008) Appl. Phys. Lett. , vol.92 , pp. 112902
- Adelmann, C.¹ Van Elshocht, S.² Franquet, A.³ Conard, T.⁴ Richard, O.⁵ Bender, H.⁶ Lehnen, P.⁷ De Gendt, S.⁸

30
- 33746215277
- 014912
- L. V. Goncharova D. G. Starodub E. Garfunkel T. Gustafsson V. Vaithyanathan J. Lettieri D. G. Schlom J. Appl. Phys. 2006 100
- (2006) J. Appl. Phys. , vol.100
- Goncharova, L.V.¹ Starodub, D.G.² Garfunkel, E.³ Gustafsson, T.⁴ Vaithyanathan, V.⁵ Lettieri, J.⁶ Schlom, D.G.⁷

31
- 0036451949
- Materials Research Society: Warrendale, PA, p 257-262
- V. Craciun, D. Craciun, N. D. Bassim, J. M. Howard, R. K. Singh in Perovskite Materials; Materials Research Society: Warrendale, PA, 2002, vol. 718, p 257-262
- (2002) Perovskite Materials; , vol.718
- Craciun, V.¹ Craciun, D.² Bassim, N.D.³ Howard, J.M.⁴ Singh In, R.K.⁵

32
- 0035101581
- P. D. Kirsch J. G. Ekerdt J. Vac. Sci. Technol. A-Vac. Surf. Films 2001 19 207 214
- (2001) J. Vac. Sci. Technol. A-Vac. Surf. Films , vol.19 , pp. 207-214
- Kirsch, P.D.¹ Ekerdt, J.G.²

33
- 42349106417
- M. Copel Appl. Phys. Lett. 2008 92 152909
- (2008) Appl. Phys. Lett. , vol.92 , pp. 152909
- Copel, M.¹

34
- 0036074827
- Y. Kitano T. Matsui N. Fujimura K. Morii T. Ito J. Cryst. Growth 2002 243 164 169
- (2002) J. Cryst. Growth , vol.243 , pp. 164-169
- Kitano, Y.¹ Matsui, T.² Fujimura, N.³ Morii, K.⁴ Ito, T.⁵

35
- 36149010724
- C. H. Perry D. J. McCarthy G. Rupprecht Phys. Rev. 1965 138 A1537 A1538
- (1965) Phys. Rev. , vol.138
- Perry, C.H.¹ McCarthy, D.J.² Rupprecht, G.³

36
- 0346093556
- S. Katayama N. Yamada M. Awano J. European Ceram. Soc. 2004 24 421 425
- (2004) J. European Ceram. Soc. , vol.24 , pp. 421-425
- Katayama, S.¹ Yamada, N.² Awano, M.³

37
- 1542635963
- J. J. Yu I. W. Boyd Thin Solid Films 2004 453-54 215 218
- (2004) Thin Solid Films , vol.453-454 , pp. 215-218
- Yu, J.J.¹ Boyd, I.W.²

38
- 1542741164
- Z. M. Wang Q. Fang J. Y. Zhang J. X. Wu Y. Di W. Chen M. L. Chen I. W. Boyd Thin Solid Films 2004 453-54 167 171
- (2004) Thin Solid Films , vol.453-454 , pp. 167-171
- Wang, Z.M.¹ Fang, Q.² Zhang, J.Y.³ Wu, J.X.⁴ Di, Y.⁵ Chen, W.⁶ Chen, M.L.⁷ Boyd, I.W.⁸

39
- 0141572318
- F. Boschini B. Robertz A. Rulmont R. Cloots J. Eur. Ceram. Soc. 2003 23 3035 3042
- (2003) J. Eur. Ceram. Soc. , vol.23 , pp. 3035-3042
- Boschini, F.¹ Robertz, B.² Rulmont, A.³ Cloots, R.⁴

40
- 84889372264
- John Wiley & Sons, Inc.: New York
- K. Nakamoto. Infrared and Raman Spectra of Inorganic and Coordination Compounds Part B: Applications in Coordination, Organometallic, and Bioinorganic Chemistry, 5th edition; John Wiley & Sons, Inc.: New York, 1997
- (1997) Infrared and Raman Spectra of Inorganic and Coordination Compounds Part B: Applications in Coordination, Organometallic, and Bioinorganic Chemistry, 5th Edition;
- Nakamoto., K.¹

41
- 0001884307
- H. Vidal S. Bernal R. T. Baker D. Finol J. A. P. Omil J. M. Pintado J. M. Rodriguez-Izquierdo J. Catal. 1999 183 53 62
- (1999) J. Catal. , vol.183 , pp. 53-62
- Vidal, H.¹ Bernal, S.² Baker, R.T.³ Finol, D.⁴ Omil, J.A.P.⁵ Pintado, J.M.⁶ Rodriguez-Izquierdo, J.M.⁷

42
- 33846988575
- S. Van Elshocht A. Hardy T. Witters C. Adelmann M. Caymax T. Conard S. De Gendt A. Franquet M. Heyns M. K. Van Bael J. Mullens Electrochem. Solid State Lett. 2007 10 G15 G17
- (2007) Electrochem. Solid State Lett. , vol.10
- Van Elshocht, S.¹ Hardy, A.² Witters, T.³ Adelmann, C.⁴ Caymax, M.⁵ Conard, T.⁶ De Gendt, S.⁷ Franquet, A.⁸ Heyns, M.⁹ Van Bael, M.K.¹⁰ Mullens, J.¹¹

43
- 59949106042
- Mater. Res. Soc. Symp. Proc. Warrendale, PA
- A. Hardy, S. Van Elshocht, J. D'Haen, S. De Gendt, M. K. Van Bael, M. Heyns, M. D'Olieslaeger, J. Mullens. Materials Science of High k Dielectric Stacks - From Fundamentals to Technology (Mater. Res. Soc. Symp. Proc. Volume 1073E, Warrendale, PA, 2008)
- (2008) Materials Science of High K Dielectric Stacks - From Fundamentals to Technology , vol.1073
- Hardy, A.¹ Van Elshocht, S.² D'Haen, J.³ De Gendt, S.⁴ Van Bael, M.K.⁵ Heyns, M.⁶ D'Olieslaeger, M.⁷ Mullens., J.⁸

44
- 34047264963
- O. Engström B. Raeissi S. Hall O. Buiu M. C. Lemme H. D. B. Gottlob P. K. Hurley K. Cherkaoui Sol.-State Electr. 2007 51 622 626
- (2007) Sol.-State Electr. , vol.51 , pp. 622-626
- Engström, O.¹ Raeissi, B.² Hall, S.³ Buiu, O.⁴ Lemme, M.C.⁵ Gottlob, H.D.B.⁶ Hurley, P.K.⁷ Cherkaoui, K.⁸

45
- 34848841589
- A. Hardy J. D'Haen M. K. Van Bael J. Mullens J. Sol-Gel Sci. Technol. 2007 44 65 74
- (2007) J. Sol-Gel Sci. Technol. , vol.44 , pp. 65-74
- Hardy, A.¹ D'Haen, J.² Van Bael, M.K.³ Mullens, J.⁴

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