Silicon carbide MEMS-resonator-based oscillator

Journal of Micromechanics and Microengineering

Volumn 19, Issue 11, 2009, Pages

  Young, Darrin J ^a   Pehlivanoǧlu, I Engin ^a   Zorman, Christian A ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL RESULTS; CLOSED-LOOP; COMB-DRIVE FINGERS; DC BIAS; ELECTROSTATIC ACTUATION; ENVIRONMENT EFFECTS; FOLDED-BEAM; INTERFACE ELECTRONICS; LOOP GAINS; MEMS RESONATORS; MICROELECTROMECHANICAL RESONATORS; MINIMUM PHASE; MOTIONAL RESISTANCE; MULTIPLE RESONANCES; NOISE FLOOR; OFFSET FREQUENCIES; OSCILLATION FREQUENCY; OSCILLATOR DESIGN; OUTPUT POWER; POLYCRYSTALLINE; PROOF MASS; PROPER DESIGN; PROTOTYPE OSCILLATORS; QUALITY FACTORS; RESIDUAL STRAINS; RESONANT FREQUENCIES; RESONANT MODE; ROCKING MODES; ROOM TEMPERATURE; SIC THIN FILMS; SIGNAL TO NOISE; SINGLE RESONANCE; SINUSOIDAL WAVEFORMS; SMALL SIGNAL; STEADY STATE OSCILLATION;

ELECTROSTATIC ACTUATORS; ELECTROSTATICS; FLOORS; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); PHASE INTERFACES; PHASE SHIFT; Q FACTOR MEASUREMENT; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE;

RESONATORS;

EID: 70350660692     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/11/115027     Document Type: Article

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