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Volumn , Issue , 2008, Pages

Exploring the limits and practicality of Q-based temperature compensation for silicon resonators

Author keywords

[No Author keywords available]

Indexed keywords

COMPENSATION SCHEMES; FREQUENCY REFERENCES; MICROMECHANICAL SILICON RESONATORS; MULTIPOINT; PROTOTYPE OSCILLATORS; QUALITY FACTORS; SILICON RESONATORS; SINGLE POINTS; TEMPERATURE COMPENSATIONS; TEMPERATURE STABILITIES;

EID: 64549110186     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2008.4796783     Document Type: Conference Paper
Times cited : (15)

References (9)
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    • Ho, G.K.1    Sundaresan, K.2    Pourkamali, S.3    Ayazi, F.4
  • 2
    • 34250632859 scopus 로고    scopus 로고
    • Temperature-compensated high-stability silicon resonators
    • Jun
    • R. Melamud et al., "Temperature-compensated high-stability silicon resonators," Applied Physics Letters, vol. 90, 244107, Jun. 2007.
    • (2007) Applied Physics Letters , vol.90 , pp. 244107
    • Melamud, R.1
  • 3
    • 0032265635 scopus 로고    scopus 로고
    • Geometric stress compensation for enhanced thermal stability in micromechanical resonators
    • Oct
    • W.-T. Hsu and C.T.-C. Nguyen. "Geometric stress compensation for enhanced thermal stability in micromechanical resonators," Proc. IEEE Itnl. Ultrasonic Symp, pp. 945-948, Oct. 1998.
    • (1998) Proc. IEEE Itnl. Ultrasonic Symp , pp. 945-948
    • Hsu, W.-T.1    Nguyen, C.T.-C.2
  • 4
    • 0036122670 scopus 로고    scopus 로고
    • Stiffness compensated temperature- insensitive micromechanical resonators
    • Jan
    • W.-T. Hsu and C.T.-C. Nguyen, "Stiffness compensated temperature- insensitive micromechanical resonators," Proc. MEMS, pp. 731-734, Jan. 2002.
    • (2002) Proc. MEMS , pp. 731-734
    • Hsu, W.-T.1    Nguyen, C.T.-C.2
  • 5
    • 47249153080 scopus 로고    scopus 로고
    • A high-stability MEMS frequency reference
    • Jun
    • M. A. Hopcroft et al., "A high-stability MEMS frequency reference," Proc. Transducers, pp. 1307-1309, Jun. 2007.
    • (2007) Proc. Transducers , pp. 1307-1309
    • Hopcroft, M.A.1
  • 6
    • 34247159444 scopus 로고    scopus 로고
    • Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators
    • May
    • B. Kim et al., "Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators," Sensors and Actuators, A: Physical, vol. 136, pp. 125-131, May 2007.
    • (2007) Sensors and Actuators, A: Physical , vol.136 , pp. 125-131
    • Kim, B.1
  • 7
    • 40449128607 scopus 로고    scopus 로고
    • Thermal isolation of encapsulated MEMS resonators
    • Feb
    • C. M. Jha et al., "Thermal isolation of encapsulated MEMS resonators," JMEMS, vol. 17, pp. 175-184, Feb. 2008.
    • (2008) JMEMS , vol.17 , pp. 175-184
    • Jha, C.M.1
  • 8
    • 18344387713 scopus 로고    scopus 로고
    • Op amp and two JFETs form a voltage-controlled amplifier
    • Apr. 28, 2005, accessed online
    • H. Santana, "Op amp and two JFETs form a voltage-controlled amplifier," Electronic Design, Apr. 28, 2005, accessed online: http://electronicdesign.com/Articles/ArticleID/10116/10116.html.
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    • Santana, H.1
  • 9
    • 45449119307 scopus 로고    scopus 로고
    • Temperature dependence of quality factor in MEMS resonators
    • Jun
    • B. Kim et al., "Temperature dependence of quality factor in MEMS resonators," JMEMS, vol. 17, pp. 755-766, Jun. 2008.
    • (2008) JMEMS , vol.17 , pp. 755-766
    • Kim, B.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.