Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range

IEEE Electron Device Letters

Volumn 29, Issue 2, 2008, Pages 146-148

  Verd, Jaume ^a   Uranga, A ^a   Abadal, G ^a   Teva, J L ^a   Torres, F ^a   Lopez J ^a   Perez Murano F ^b   Esteve, J ^b   Barniol, Nuria ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Allan deviation; CMOS microelectromechanical system (MEMS); Micromechanical oscillator; Microsensor; Resonant sensing; System on chip (SoC)

Indexed keywords

DESIGN; ELECTRIC NETWORK TOPOLOGY; FABRICATION; INTEGRATED CIRCUIT LAYOUT; MEMS; MICROSENSORS; OSCILLATORS (MECHANICAL);

MICROMECHANICAL OSCILLATOR; SYSTEM-ON-CHIP;

CMOS INTEGRATED CIRCUITS;

EID: 39549093113     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2007.914085     Document Type: Article

References (16)

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