CMOS MEMS oscillator for gas chemical detection

Proceedings of IEEE Sensors

Volumn 2, Issue , 2004, Pages 955-958

  Bedair, Serah S ^a   Fedder, Gary K ^a,b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Gas chemical detector; Mass sensitive resonator; Microbalance; Micromechanical oscillator; Resonator

Indexed keywords

BANDWIDTH; CMOS INTEGRATED CIRCUITS; FEEDBACK; METHANOL; MICROELECTROMECHANICAL DEVICES;

GAS CHEMICAL DETECTION; SELF-EXCITED RESONATORS;

GAS DETECTORS;

EID: 27544480292     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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