Free-free beam silicon carbide nanomechanical resonators

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 342-343

  Huang, X M H ^a   Prakash, M K ^a   Zorman, C A ^b   Mehregany, M ^b   Roukers, M L ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Case Western Reserve University   (United States)

Author keywords

Acoustic beams; Etching; Frequency; Lithography; Optical attenuators; Optical films; Optical resonators; Q factor; Resonance; Silicon carbide

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTICS; ACTUATORS; ETCHING; LITHOGRAPHY; MICROSYSTEMS; OPTICAL FILMS; OPTICAL RESONATORS; Q FACTOR MEASUREMENT; RESONANCE; RESONATORS; SILICON; SILICON CARBIDE; TRANSDUCERS;

ACOUSTIC BEAMS; DEVICE TESTING; DOUBLY CLAMPED BEAM; FREQUENCY; NANOMECHANICAL RESONATORS; OPTICAL ATTENUATORS; Q-FACTORS; QUALITY FACTORS;

SOLID-STATE SENSORS;

EID: 84891371651     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215323     Document Type: Conference Paper

References (5)

1. X.M.H.Huang, C.A. Zorman, M. Mehregany & M.L. Roukes, "Nanodevice motion at microwave frequencies", Nature 421, 496 (2003).
2. Y. T. Yang, K. L. Ekinci, X. M. H. Huang, L. M. Schiavone, M. L. Roukes, C. A. Zorman, & M. Mehregany, "Monocrystalline silicon carbide nanoelectromechanical systems", Appl. Phys. Lett., 78(2), 162-164 (2001).
3. K. L. Ekinci, Y. T. Yang, X. M. H. Huang, & M. L. Roukes, "Balanced electronic detection of displacement in nanoelectromechanical systems", Appl. Phys. Lett., 81(12), 2253-2255 (2002).
4. K. Wang, Y. Yu, A.-C. Wong, and C. T.-C. Nguyen, "VHF free-free beam high-Q micromechanical resonators," Technical Digest, 12th International IEEE Micro Electro Mechanical Systems Conference, Orlando, Florida, Jan. 17-21, 1999, pp. 453-458.
5. th Int. Conf. on Solid-State Sensors & Actuators (Transducers'01), Munich, Germany, June 10-14g, 2001, pp. 1110-1113.