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Volumn 56, Issue 9, 2009, Pages 1919-1923

Quantitative analysis of dopant distribution and activation across p-n junctions in AlGaAs/GaAs light-emitting diodes using off-axis electron holography

Author keywords

AlGaAs GaAs heterostructure; Dopant activation; Dopant profiling; Electron holography; Light emitting diode (LED)

Indexed keywords

ACTIVATION EFFICIENCY; ALGAAS/GAAS; ALGAAS/GAAS HETEROSTRUCTURE; BAND EDGE; DEVICE DESIGNERS; DOPANT ACTIVATION; DOPANT CONCENTRATIONS; DOPANT DISTRIBUTION; DOPANT LEVELS; DOPANT PROFILING; DOPING PROFILES; ELECTROSTATIC POTENTIALS; HETEROSTRUCTURES; JUNCTION PROFILES; LIGHT-EMITTING DIODE (LED); OFF-AXIS ELECTRON HOLOGRAPHY; P-N JUNCTION; QUANTITATIVE ANALYSIS;

EID: 69549103251     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2009.2025914     Document Type: Article
Times cited : (6)

References (26)
  • 1
    • 84938006654 scopus 로고
    • Theory of a wide-gap emitter for transistors
    • Nov
    • H. Kroemer, "Theory of a wide-gap emitter for transistors," Proc. IRE, vol. 45, no. 11, pp. 1535-1537, Nov. 1957.
    • (1957) Proc. IRE , vol.45 , Issue.11 , pp. 1535-1537
    • Kroemer, H.1
  • 2
    • 69549142378 scopus 로고    scopus 로고
    • Z. I. Alferov and R. F. Kazarinov, Semiconductor laser with electric pumping, Inventor's Certificate 181737 [in Russian, Appli. 950840, priority as of Mar. 30, 1963
    • Z. I. Alferov and R. F. Kazarinov, "Semiconductor laser with electric pumping," Inventor's Certificate 181737 [in Russian]. Appli. 950840, priority as of Mar. 30, 1963.
  • 3
    • 0008456740 scopus 로고
    • New rectifying semiconductor structure by molecular beam epitaxy
    • Mar
    • C. L. Allyn, A. C. Gossard, and W. Wiegmann, "New rectifying semiconductor structure by molecular beam epitaxy," Appl. Phys. Lett., vol. 36, no. 5, pp. 373-376, Mar. 1980.
    • (1980) Appl. Phys. Lett , vol.36 , Issue.5 , pp. 373-376
    • Allyn, C.L.1    Gossard, A.C.2    Wiegmann, W.3
  • 7
    • 34848890616 scopus 로고    scopus 로고
    • Electron holography: Phase imaging with nanometer resolution
    • Aug
    • M. R. McCartney and D. J. Smith, "Electron holography: Phase imaging with nanometer resolution," Annu. Rev. Mater. Sci., vol. 37, pp. 729-767, Aug. 2007.
    • (2007) Annu. Rev. Mater. Sci , vol.37 , pp. 729-767
    • McCartney, M.R.1    Smith, D.J.2
  • 8
    • 79956048451 scopus 로고    scopus 로고
    • Quantitative analysis of one-dimensional dopant profile by electron holography
    • Apr
    • M. R. McCartney, M. A. Gribelyuk, J. Li, P. Ronsheim, J. S. McMurray, and D. J. Smith, "Quantitative analysis of one-dimensional dopant profile by electron holography," Appl. Phys. Lett., vol. 80, no. 17, pp. 3213-3215, Apr. 2002.
    • (2002) Appl. Phys. Lett , vol.80 , Issue.17 , pp. 3213-3215
    • McCartney, M.R.1    Gribelyuk, M.A.2    Li, J.3    Ronsheim, P.4    McMurray, J.S.5    Smith, D.J.6
  • 10
    • 36449003599 scopus 로고
    • Direct observation of potential distribution across Si/Si p-n junctions using off axis electron holography
    • Nov
    • M. R. McCartney, D. J. Smith, R. Hull, J. C. Bean, E. Voelkl, and B. Frost, "Direct observation of potential distribution across Si/Si p-n junctions using off axis electron holography," Appl. Phys. Lett., vol. 65, no. 20, pp. 2603-2605, Nov. 1994.
    • (1994) Appl. Phys. Lett , vol.65 , Issue.20 , pp. 2603-2605
    • McCartney, M.R.1    Smith, D.J.2    Hull, R.3    Bean, J.C.4    Voelkl, E.5    Frost, B.6
  • 13
    • 36849066232 scopus 로고    scopus 로고
    • Quantitative analysis of 2-D electrostatic potential distributions in 90-nm Si pMOSFETs using off-axis electron holography
    • Dec
    • M. G. Han, P. Fejes, Q. Xie, S. Bagchi, B. Taylor, J. Conner, and M. R. McCartney, "Quantitative analysis of 2-D electrostatic potential distributions in 90-nm Si pMOSFETs using off-axis electron holography," IEEE Trans. Electron Devices, vol. 54, no. 12, pp. 3336-3341, Dec. 2007.
    • (2007) IEEE Trans. Electron Devices , vol.54 , Issue.12 , pp. 3336-3341
    • Han, M.G.1    Fejes, P.2    Xie, Q.3    Bagchi, S.4    Taylor, B.5    Conner, J.6    McCartney, M.R.7
  • 14
    • 45149116193 scopus 로고    scopus 로고
    • Electron holography analysis of a shallow junction for planarbulk metal-oxide-semiconductor field-effect transistors approaching the scaling limit
    • Jun
    • N. Ikarashi, T. Ikezawa, K. Uejima, T. Fukai, M. Miyamura, A. Toda, and M. Hane, "Electron holography analysis of a shallow junction for planarbulk metal-oxide-semiconductor field-effect transistors approaching the scaling limit," J. Appl. Phys., vol. 103, no. 11, p. 114 514, Jun. 2008.
    • (2008) J. Appl. Phys , vol.103 , Issue.11 , pp. 114-514
    • Ikarashi, N.1    Ikezawa, T.2    Uejima, K.3    Fukai, T.4    Miyamura, M.5    Toda, A.6    Hane, M.7
  • 15
    • 33746189796 scopus 로고    scopus 로고
    • Sample preparation for precise and quantitative electron holographic analysis of semiconductor devices
    • Mar
    • M. G. Han, J. Li, Q. Xie, P. Fejes, J. Conner, B. Taylor, and M. R. McCartney, "Sample preparation for precise and quantitative electron holographic analysis of semiconductor devices," Microsc. Microanal. vol. 12, no. 4, pp. 295-301, Mar. 2006.
    • (2006) Microsc. Microanal , vol.12 , Issue.4 , pp. 295-301
    • Han, M.G.1    Li, J.2    Xie, Q.3    Fejes, P.4    Conner, J.5    Taylor, B.6    McCartney, M.R.7
  • 16
    • 0032620923 scopus 로고    scopus 로고
    • Two-dimensional mapping of the electrostatic potential in transistors by electron holography
    • Mar
    • W. D. Rau, P. Schwander, F. H. Baumann, W. Hoppner, and A. Ourmazd, "Two-dimensional mapping of the electrostatic potential in transistors by electron holography," Phys. Rev. Lett., vol. 82, no. 12, pp. 2614-2617, Mar. 1999.
    • (1999) Phys. Rev. Lett , vol.82 , Issue.12 , pp. 2614-2617
    • Rau, W.D.1    Schwander, P.2    Baumann, F.H.3    Hoppner, W.4    Ourmazd, A.5
  • 17
    • 32444434282 scopus 로고    scopus 로고
    • Improvement in electron holographic phase images of focused-ion-beam-milled GaAs and Si p-n junctions by in situ annealing
    • Feb
    • D. Cooper, A. C. Twitchett, P. K. Somodi, P. A. Midgley, R. E. Dunin-Borkorski, I. Farrer, and D. A. Ritchie, "Improvement in electron holographic phase images of focused-ion-beam-milled GaAs and Si p-n junctions by in situ annealing," Appl. Phys. Lett., vol. 88, no. 6, p. 063 510, Feb. 2006.
    • (2006) Appl. Phys. Lett , vol.88 , Issue.6 , pp. 063-510
    • Cooper, D.1    Twitchett, A.C.2    Somodi, P.K.3    Midgley, P.A.4    Dunin-Borkorski, R.E.5    Farrer, I.6    Ritchie, D.A.7
  • 18
    • 45149132903 scopus 로고    scopus 로고
    • Electron holography characterization of ultra shallow junctions in 30-nm-gate-length metal-oxide-semiconductor field-effect transistors
    • Apr
    • N. Ikarashi, M. Oshida, M. Miyamura, M. Saitoh, A. Mineji, and S. Shishiguchi, "Electron holography characterization of ultra shallow junctions in 30-nm-gate-length metal-oxide-semiconductor field-effect transistors," Jpn. J. Appl. Phys., vol. 47, no. 4, pp. 2365-2368, Apr. 2008.
    • (2008) Jpn. J. Appl. Phys , vol.47 , Issue.4 , pp. 2365-2368
    • Ikarashi, N.1    Oshida, M.2    Miyamura, M.3    Saitoh, M.4    Mineji, A.5    Shishiguchi, S.6
  • 19
    • 0031236251 scopus 로고    scopus 로고
    • Off axis electron holography of epitaxial FePt films
    • Sep
    • M. R. McCartney, D. J. Smith, R. F. C. Farrow, and R. F. Marks, "Off axis electron holography of epitaxial FePt films," J. Appl. Phys. vol. 82, no. 5, pp. 2461-2465, Sep. 1997.
    • (1997) J. Appl. Phys , vol.82 , Issue.5 , pp. 2461-2465
    • McCartney, M.R.1    Smith, D.J.2    Farrow, R.F.C.3    Marks, R.F.4
  • 20
    • 0027640569 scopus 로고
    • Accurate measurements of mean inner potential of crystal wedges using digital electron holograms
    • Aug
    • M. Gajdardziska-Josifovska, M. R. McCartney, W. J. de Ruijter, D. J. Smith, J. K. Weiss, and J. M. Zuo, "Accurate measurements of mean inner potential of crystal wedges using digital electron holograms," Ultramicroscopy, vol. 50, no. 3, pp. 285-299, Aug. 1993.
    • (1993) Ultramicroscopy , vol.50 , Issue.3 , pp. 285-299
    • Gajdardziska-Josifovska, M.1    McCartney, M.R.2    de Ruijter, W.J.3    Smith, D.J.4    Weiss, J.K.5    Zuo, J.M.6
  • 21
    • 0029278184 scopus 로고
    • Detector geometry, thermal diffuse scattering and strain effects in ADF STEM imaging
    • Apr
    • S. Hillyard and J. Silcox, "Detector geometry, thermal diffuse scattering and strain effects in ADF STEM imaging," Ultramicroscopy vol. 58, no. 1, pp. 6-17, Apr. 1995.
    • (1995) Ultramicroscopy , vol.58 , Issue.1 , pp. 6-17
    • Hillyard, S.1    Silcox, J.2
  • 23
    • 34948880693 scopus 로고    scopus 로고
    • Determination of the inelastic mean-free-path and mean inner potential for AlAs and GaAs using off axis electron holography and convergent beam electron diffraction
    • Oct
    • S. Chung, D. J. Smith, and M. R. McCartney, "Determination of the inelastic mean-free-path and mean inner potential for AlAs and GaAs using off axis electron holography and convergent beam electron diffraction," Microsc. Microanal., vol. 13, no. 5, pp. 329-335, Oct. 2007.
    • (2007) Microsc. Microanal , vol.13 , Issue.5 , pp. 329-335
    • Chung, S.1    Smith, D.J.2    McCartney, M.R.3
  • 24
    • 0346667103 scopus 로고    scopus 로고
    • Semiconductor dopant profiling by off axis electron holography
    • Mar
    • J. Li, M. R. McCartney, and D. J. Smith, "Semiconductor dopant profiling by off axis electron holography," Ultramicroscopy, vol. 94, no. 2, pp. 149-161, Mar. 2003.
    • (2003) Ultramicroscopy , vol.94 , Issue.2 , pp. 149-161
    • Li, J.1    McCartney, M.R.2    Smith, D.J.3
  • 26
    • 0344835591 scopus 로고
    • xAs alloys from a high-pressure experiment
    • Aug
    • xAs alloys from a high-pressure experiment," J. Phys. C, Solid State Phys., vol. 13, no. 23, pp. 4323-4334, Aug. 1980.
    • (1980) J. Phys. C, Solid State Phys , vol.13 , Issue.23 , pp. 4323-4334
    • Saxena, A.K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.