SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 4, 2009, Pages 1838-1843

Proximity effect in ion-beam-induced deposition of nanopillars

(3) Chen, Ping a Salemink, Huub W M a Alkemade, Paul F A a

a DELFT UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENCE POINTS; ION BEAM INDUCED DEPOSITION; NANOPILLARS; PRECURSOR MOLECULES; PROTOTYPING; PROXIMITY EFFECTS; SUBSTRATE CONDUCTIVITY; SUBSTRATE SURFACE; THREE-DIMENSIONAL NANOSTRUCTURES;

DESORPTION; ION BEAMS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SUPERCONDUCTING MATERIALS;

PLANTS (BOTANY);

EID: 68349128842 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.3155825 Document Type: Article

Times cited : (15)

References (28)

1
- 0021425718
- 0021-4922,. 10.1143/JJAP.23.L293
- K. Gamo, N. Takakura, N. Samoto, R. Shimizu, and S. Namba, Jpn. J. Appl. Phys., Part 2 0021-4922 23, L293 (1984). 10.1143/JJAP.23.L293
- (1984) Jpn. J. Appl. Phys., Part 2 , vol.23 , pp. 293
- Gamo, K.¹ Takakura, N.² Samoto, N.³ Shimizu, R.⁴ Namba, S.⁵

2
- 0000336809
- 1071-1023,. 10.1116/1.585115
- A. Wagner, J. L. Mauer, P. G. Blauner, S. J. Kirch, and P. Longo, J. Vac. Sci. Technol. B 1071-1023 8, 1557 (1990). 10.1116/1.585115
- (1990) J. Vac. Sci. Technol. B , vol.8 , pp. 1557
- Wagner, A.¹ Mauer, J.L.² Blauner, P.G.³ Kirch, S.J.⁴ Longo, P.⁵

3
- 0034314737
- Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition
- DOI 10.1116/1.1319689
- S. Matsui, T. Kaito, J. Fujita, M. Komuro, and K. Kanda, J. Vac. Sci. Technol. B 1071-1023 18, 3181 (2000). 10.1116/1.1319689 (Pubitemid 32088180)
- (2000) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.18 , Issue.6 , pp. 3181-3184
- Matsui, S.¹ Kaito, T.² Fujita, J.-I.³ Komuro, M.⁴ Kanda, K.⁵ Haruyama, Y.⁶

4
- 0942289231
- 1071-1023,. 10.1116/1.1630329
- T. Morita, R. Kometani, K. Watanabe, and K. Kanda, J. Vac. Sci. Technol. B 1071-1023 21, 2737 (2003). 10.1116/1.1630329
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 2737
- Morita, T.¹ Kometani, R.² Watanabe, K.³ Kanda, K.⁴

5
- 33845264618
- Mechanical characteristics and applications of diamondlike-carbon cantilevers fabricated by focused-ion-beam chemical vapor deposition
- DOI 10.1116/1.2357960
- J. Igaki, K. Nakamatsu, R. Kometani, K. Kanda, Y. Haruyama, T. Kaito, and S. Matsui, J. Vac. Sci. Technol. B 1071-1023 24, 2911 (2006). 10.1116/1.2357960 (Pubitemid 44866438)
- (2006) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.24 , Issue.6 , pp. 2911-2914
- Igaki, J.-Y.¹ Nakamatsu, K.-I.² Kometani, R.³ Kanda, K.⁴ Haruyama, Y.⁵ Kaito, T.⁶ Matsui, S.⁷

6
- 33748259479
- Three-dimensional rotor fabrication by focused-ion-beam chemical-vapor-deposition
- DOI 10.1016/j.mee.2005.12.022, PII S0167931705005800
- J. Igaki, Microelectron. Eng. 0167-9317 83, 1221 (2006). 10.1016/j.mee.2005.12.022 (Pubitemid 44316453)
- (2006) Microelectronic Engineering , vol.83 , Issue.SPEC. ISS. , pp. 1221-1224
- Igaki, J.-y.¹ Kometani, R.² Nakamatsu, K.-i.³ Kanda, K.⁴ Haruyama, Y.⁵ Ochiai, Y.⁶ Fujita, J.-i.⁷ Kaito, T.⁸ Matsui, S.⁹

7
- 31144446021
- Performance of nanomanipulator fabricated on glass capollary by focused-ion-beam chemical vapor deposition
- DOI 10.1116/1.1849211
- R. Kometani, J. Vac. Sci. Technol. B 1071-1023 23, 298 (2005). 10.1116/1.1849211 (Pubitemid 43126571)
- (2005) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.23 , Issue.1 , pp. 298-301
- Kometani, R.¹ Hoshino, T.² Kondo, K.³ Kanda, K.⁴ Haruyama, Y.⁵ Kaito, T.⁶ Fujita, J.-I.⁷ Ishida, M.⁸ Ochiai, Y.⁹ Matsui, S.¹⁰

8
- 12444347538
- 0021-4922,. 10.1143/JJAP.42.4107
- R. Kometani, Jpn. J. Appl. Phys., Part 1 0021-4922 42, 4107 (2003). 10.1143/JJAP.42.4107
- (2003) Jpn. J. Appl. Phys., Part 1 , vol.42 , pp. 4107
- Kometani, R.¹

9
- 19944408624
- Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition
- DOI 10.1016/j.nimb.2005.03.074, PII S0168583X05002983, Inelastic Ion-Surface Collisions Proceedings of the 15th International Workshop on Inelastic Ion-Surface Collisons
- R. Kometani, Nucl. Instrum. Methods Phys. Res. B 0168-583X 232, 362 (2005). 10.1016/j.nimb.2005.03.074 (Pubitemid 40750624)
- (2005) Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms , vol.232 , Issue.1-4 , pp. 362-366
- Kometani, R.¹ Hoshino, T.² Kanda, K.³ Haruyama, Y.⁴ Kaito, T.⁵ Fujita, J.-I.⁶ Ishida, M.⁷ Ochiai, Y.⁸ Matsui, S.⁹

10
- 33748278963
- Cell wall cutting tool and nano-net fabrication by FIB-CVD for subcellular operations and analysis
- DOI 10.1016/j.mee.2006.01.217, PII S0167931706002449
- R. Kometani, Microelectron. Eng. 0167-9317 83, 1642 (2006). 10.1016/j.mee.2006.01.217 (Pubitemid 44316443)
- (2006) Microelectronic Engineering , vol.83 , Issue.SPEC. ISS. , pp. 1642-1645
- Kometani, R.¹ Funabiki, R.² Hoshino, T.³ Kanda, K.⁴ Haruyama, Y.⁵ Kaito, T.⁶ Fujita, J.-i.⁷ Ochiai, Y.⁸ Matsui, S.⁹

11
- 37549065119
- 0021-4922,. 10.1143/JJAP.46.7963
- R. Kometani, H. Koike, K. Kanda, Y. Haruyama, T. Kaito, and S. Matsui, Jpn. J. Appl. Phys., Part 1 0021-4922 46, 7963 (2007). 10.1143/JJAP.46.7963
- (2007) Jpn. J. Appl. Phys., Part 1 , vol.46 , pp. 7963
- Kometani, R.¹ Koike, H.² Kanda, K.³ Haruyama, Y.⁴ Kaito, T.⁵ Matsui, S.⁶

12
- 33746303582
- Evaluation of field electron emitter fabricated using focused-ion-beam chemical vapor deposition
- DOI 10.1143/JJAP.45.L711
- R. Kometani, K. Kanda, Y. Haruyama, T. Kaito, and S. Matsui, Jpn. J. Appl. Phys., Part 2 0021-4922 45, L711 (2006). 10.1143/JJAP.45.L711 (Pubitemid 44106950)
- (2006) Japanese Journal of Applied Physics, Part 2: Letters , vol.45 , Issue.24-28
- Kometani, R.¹ Kanda, K.² Haruyama, Y.³ Kaito, T.⁴ Matsui, S.⁵

13
- 37549028381
- 0021-4922,. 10.1143/JJAP.46.7987
- R. Kometani, Y. Haruyama, K. Kanda, T. Kaito, and S. Matsui, Jpn. J. Appl. Phys., Part 1 0021-4922 46, 7987 (2007). 10.1143/JJAP.46.7987
- (2007) Jpn. J. Appl. Phys., Part 1 , vol.46 , pp. 7987
- Kometani, R.¹ Haruyama, Y.² Kanda, K.³ Kaito, T.⁴ Matsui, S.⁵

14
- 62249185202
- 10.1143/JJAP.47.8120
- P. Chen, H. W. M. Salemink, and P. F. A. Alkemade, Jpn. J. Appl. Phys. 47, 8120 (2008). 10.1143/JJAP.47.8120
- (2008) Jpn. J. Appl. Phys. , vol.47 , pp. 8120
- Chen, P.¹ Salemink, H.W.M.² Alkemade, P.F.A.³

15
- 18544368821
- 1154-2799,. 10.1051/mmm:0199200304032300
- N. A. Kislov and I. I. Khodos, Microsc. Microanal. Microstruct. 1154-2799 3, 323 (1992). 10.1051/mmm:0199200304032300
- (1992) Microsc. Microanal. Microstruct. , vol.3 , pp. 323
- Kislov, N.A.¹ Khodos, I.I.²

16
- 33745647869
- Proximity effect in electron-beam-induced deposition
- DOI 10.1143/JJAP.45.5517
- K. Mitsuishi, M. Shimojo, M. Takeguchi, M. Tanaka, and K. Furuya, Jpn. J. Appl. Phys., Part 1 0021-4922 45, 5517 (2006). 10.1143/JJAP.45.5517 (Pubitemid 43965733)
- (2006) Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers , vol.45 , Issue.B , pp. 5517-5521
- Mitsuishi, K.¹ Shimojo, M.² Takeguchi, M.³ Tanaka, M.⁴ Furuya, K.⁵

17
- 0036648348
- Properties and applications of cobalt-based material produced by electron-beam-induced deposition
- DOI 10.1116/1.1481040
- Y. M. Lau, P. C. Chee, J. T. Thong, and V. Ng, J. Vac. Sci. Technol. B 1071-1023 20, 1295 (2002). 10.1116/1.1481040 (Pubitemid 34891103)
- (2002) Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , vol.20 , Issue.4 , pp. 1295-1302
- Lau, Y.M.¹ Chee, P.C.² Thong, J.T.L.³ Ng, V.⁴

18
- 49749114396
- 1071-1023,. 10.1116/1.2955728
- I. Utke, P. Hoffmann, and J. Melngailis, J. Vac. Sci. Technol. B 1071-1023 26, 1197 (2008). 10.1116/1.2955728
- (2008) J. Vac. Sci. Technol. B , vol.26 , pp. 1197
- Utke, I.¹ Hoffmann, P.² Melngailis, J.³

19
- 0141876605
- 0003-6951,. 10.1063/1.97287
- G. M. Shedd, H. Lezec, A. D. Dubner, and J. Melngailis, Appl. Phys. Lett. 0003-6951 49, 1584 (1986). 10.1063/1.97287
- (1986) Appl. Phys. Lett. , vol.49 , pp. 1584
- Shedd, G.M.¹ Lezec, H.² Dubner, A.D.³ Melngailis, J.⁴

20
- 55049111174
- 10.1143/JJAP.47.5123
- P. Chen, P. F. A. Alkemade, and H. W. M. Salemink, Jpn. J. Appl. Phys. 47, 5123 (2008). 10.1143/JJAP.47.5123
- (2008) Jpn. J. Appl. Phys. , vol.47 , pp. 5123
- Chen, P.¹ Alkemade, P.F.A.² Salemink, H.W.M.³

21
- 0009665698
- 0031-7918.
- J. L. H. Jonker, Philips Res. Rep. 0031-7918 6, 372 (1951).
- (1951) Philips Res. Rep. , vol.6 , pp. 372
- Jonker, J.L.H.¹

22
- 5344250745
- 0044-3328,. 10.1007/BF01349871
- H. J. Klein, Z. Phys. 0044-3328 188, 78 (1965). 10.1007/BF01349871
- (1965) Z. Phys. , vol.188 , pp. 78
- Klein, H.J.¹

23
- 68349163712
- in, edited by R. Behrisch and W. Eckstein (Springer, Berlin),.
- H. Gnaser, in Sputtering by Particle Bombardment, edited by, R. Behrisch, and, W. Eckstein, (Springer, Berlin, 2007), p. 275.
- (2007) Sputtering by Particle Bombardment , pp. 275
- Gnaser, H.¹

24
- 31844444168
- Growth manner and mechanical characteristics of amorphous carbon nanopillar grown by electron-beam-induced chemical vapor deposition
- DOI 10.1143/JJAP.44.5646
- S. Okada, Jpn. J. Appl. Phys., Part 1 0021-4922 44, 5646 (2005). 10.1143/JJAP.44.5646 (Pubitemid 43182975)
- (2005) Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers , vol.44 , Issue.B , pp. 5646-5650
- Okada, S.¹ Mukawa, T.² Kobayashi, R.³ Fujita, J.-I.⁴ Ishida, M.⁵ Ichihashi, T.⁶ Ochiai, Y.⁷ Kaito, T.⁸ Matsui, S.⁹

25
- 33745662599
- Comparison of Young's modulus dependency on beam accelerating voltage between electron-beam- and focused ion-beam-induced chemical vapor deposition pillars
- DOI 10.1143/JJAP.45.5556
- S. Okada, T. Mukawa, R. Kobayashi, M. Ishida, Y. Ochiai, T. Kaito, S. Matsui, and J. Fujita, Jpn. J. Appl. Phys., Part 1 0021-4922 45, 5556 (2006). 10.1143/JJAP.45.5556 (Pubitemid 43965743)
- (2006) Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers , vol.45 , Issue.B , pp. 5556-5559
- Okada, S.¹ Mukawa, T.² Kobayashi, R.³ Ishida, M.⁴ Ochiai, Y.⁵ Kaito, T.⁶ Matsui, S.⁷ Fujita, J.-I.⁸

26
- 0033267624
- 1071-1023,. 10.1116/1.590971
- A. J. DeMarco and J. Melngailis, J. Vac. Sci. Technol. B 1071-1023 17, 3154 (1999). 10.1116/1.590971
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 3154
- Demarco, A.J.¹ Melngailis, J.²

27
- 14944361396
- Influence of the beam scan direction during focused electron beam induced deposition of 3D nanostructures
- DOI 10.1016/j.mee.2005.01.007, PII S0167931705000092, Proceedings of the 30th International Conference on Micro- and Nano-Engineering
- T. Bret, I. Utke, and P. Hoffmann, Microelectron. Eng. 0167-9317 78-79, 307 (2005). 10.1016/j.mee.2005.01.007 (Pubitemid 40370977)
- (2005) Microelectronic Engineering , vol.78-79 , Issue.1-4 , pp. 307-313
- Bret, T.¹ Utke, I.² Hoffmann, P.³

28
- 68349162042
- in, edited by A. H. Beck (Pergamon, New York), Vol.,.
- D. J. Gibbon, in Handbook of Vacuum Physics, edited by, A. H. Beck, (Pergamon, New York, 1966), Vol. 2, p. 349.
- (1966) Handbook of Vacuum Physics , vol.2 , pp. 349
- Gibbon, D.J.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.