Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scans

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3619, Issue , 1999, Pages 112-120

  Rothe, Hendrik ^a   Hueser, Dorothee ^a   Kasper, Andree ^a   Rinder, Thomas ^a  

^a HELMUT SCHMIDT UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ATOMIC FORCE MICROSCOPY; LIGHT REFLECTION; LIGHT SCATTERING; OPTICAL DEVICES; OPTICAL SENSORS; PROBABILITY DISTRIBUTIONS; ROUGHNESS MEASUREMENT; SEMICONDUCTOR DEVICES; STRAY LIGHT;

STRAY LIGHT SENSORS;

SURFACE PROPERTIES;

EID: 0032677215     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)