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Volumn 28, Issue 2, 2004, Pages 181-192

Trade-offs and performance limitations in mechatronic systems: A case study

Author keywords

AFM; Atomic force microscope; Mechatronics; Modeling; Nanotechnology; Performance limitations; Piezoelectric; Trade offs

Indexed keywords

ATOMIC FORCE MICROSCOPY; BANDWIDTH; COMPUTER SIMULATION; MATHEMATICAL MODELS; NANOTECHNOLOGY; PARAMETER ESTIMATION; PIEZOELECTRICITY; THREE TERM CONTROL SYSTEMS;

EID: 8344240329     PISSN: 13675788     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.arcontrol.2004.02.001     Document Type: Article
Times cited : (13)

References (14)
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    • Dynamics of contact-mode atomic force microscopes
    • Chicago, Illinois, USA, June 28-30
    • El Rifai, O. M., & Youcef-Toumi, K. (2000). Dynamics of contact-mode atomic force microscopes. Proceedings of the American Control Conference (pp. 2118-2122). Chicago, Illinois, USA, June 28-30.
    • (2000) Proceedings of the American Control Conference , pp. 2118-2122
    • El Rifai, O.M.1    Youcef-Toumi, K.2
  • 4
    • 0034857597 scopus 로고    scopus 로고
    • Coupling in piezoelectric tube scanners used in scanning probe microscopes
    • Arlington, Virginia, USA, June 25-27
    • El Rifai, O. M., & Youcef-Toumi, K. (2001). Coupling in piezoelectric tube scanners used in scanning probe microscopes. Proceedings of the American Control Conference (pp. 3251-3255). Arlington, Virginia, USA, June 25-27.
    • (2001) Proceedings of the American Control Conference , pp. 3251-3255
    • El Rifai, O.M.1    Youcef-Toumi, K.2
  • 6
    • 0142225663 scopus 로고    scopus 로고
    • Trade-offs and performance limitations in atomic force microscope feedback system
    • Berkeley, CA, USA, December 9-11
    • El Rifai, O. M., & Youcef-Toumi, K. (2002). Trade-offs and performance limitations in atomic force microscope feedback system. Proceedings of the 2nd IFAC Conference on Mechatronic Systems (pp. 185-190). Berkeley, CA, USA, December 9-11.
    • (2002) Proceedings of the 2nd IFAC Conference on Mechatronic Systems , pp. 185-190
    • El Rifai, O.M.1    Youcef-Toumi, K.2
  • 8
    • 0033132384 scopus 로고    scopus 로고
    • Fundamental limitations due to jω-axis zeros in siso systems
    • Goodwin, G. C., Woodyatt, A. R., Middleton, R. H., & Shim, J. (1999). Fundamental limitations due to jω-axis zeros in siso systems. Automatica, 35, 857-863.
    • (1999) Automatica , vol.35 , pp. 857-863
    • Goodwin, G.C.1    Woodyatt, A.R.2    Middleton, R.H.3    Shim, J.4
  • 10
    • 0029203672 scopus 로고
    • Dynamics and control of piezotube actuators for subnanometer precision applications
    • Seattle, Washington, USA, June 21-23
    • Ohara, T., & Youcef-Toumi, K. (1995). Dynamics and control of piezotube actuators for subnanometer precision applications. Proceedings of the American Control Conference (pp. 3808-3812). Seattle, Washington, USA, June 21-23.
    • (1995) Proceedings of the American Control Conference , pp. 3808-3812
    • Ohara, T.1    Youcef-Toumi, K.2
  • 11
    • 0035419646 scopus 로고    scopus 로고
    • High performance feedback for fast scanning atomic force microscopes
    • Seattle, Washington, USA, June
    • Schitter, G., Menold, P., Knapp, H. F., Allgower, F., & Stemmer, A. (2001). High performance feedback for fast scanning atomic force microscopes. Seattle, Washington, USA, JuneReview of Scientific Instruments, 72(8), 3320-3327.
    • (2001) Review of Scientific Instruments , vol.72 , Issue.8 , pp. 3320-3327
    • Schitter, G.1    Menold, P.2    Knapp, H.F.3    Allgower, F.4    Stemmer, A.5
  • 13
    • 0002849393 scopus 로고
    • Dynamics of piezoelectric tube scanners for scanning probe microscopy
    • Taylor, M. E. (1993). Dynamics of piezoelectric tube scanners for scanning probe microscopy. Review of Scientific Instruments, 64(1), 154-158.
    • (1993) Review of Scientific Instruments , vol.64 , Issue.1 , pp. 154-158
    • Taylor, M.E.1
  • 14
    • 0031340987 scopus 로고    scopus 로고
    • Transient responses of a piezoelectric tube scanner
    • Yang, S., & Huang, W. (1997). Transient responses of a piezoelectric tube scanner. Review of Scientific Instruments, 68(1), 4483-4487.
    • (1997) Review of Scientific Instruments , vol.68 , Issue.1 , pp. 4483-4487
    • Yang, S.1    Huang, W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.