A current cycle feedback iterative learning control approach to AFM imaging

Proceedings of the American Control Conference

Volumn , Issue , 2008, Pages 2040-2045

  Wu, Ying ^a   Zou, Qingze ^a   Su, Chanmin ^b  

^a Iowa State University   (United States)

^b VEECO INSTRUMENTS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; EXTREME ULTRAVIOLET LITHOGRAPHY; LEARNING ALGORITHMS; LEARNING SYSTEMS; THREE DIMENSIONAL; TWO TERM CONTROL SYSTEMS; UNCERTAINTY ANALYSIS;

ADVANCED CONTROLLING; AFM IMAGING; AFM PROBE; ATOMIC FORCE MICROSCOPE; AXIS CONTROL; CAUSALITY CONSTRAINTS; CONTROLLER DESIGNS; FEED FORWARD; HIGH-SPEED IMAGING; INVERSION TECHNIQUES; ITERATIVE LEARNING CONTROL; MODEL UNCERTAINTIES; PRECISION POSITIONING; VERTICAL DIRECTIONS;

IMAGING TECHNIQUES;

EID: 52449129069     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2008.4586793     Document Type: Conference Paper

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