Computer modeling of plasmas and plasma-surface interactions

Plasma Processes and Polymers

Volumn 6, Issue 5, 2009, Pages 295-307

  Bogaerts, Annemie ^a   Bultinck, Evi ^a   Eckert, Maxie ^a   Georgieva, Violeta ^a   Mao, Ming ^a   Neyts, Erik ^a   Schwaederlé, Laurent ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Computer simulations; Fluid modeling; Molecular dynamics; Particle in cell Monte Carlo; Plasma modeling; Plasma surface interactions

Indexed keywords

CAPACITIVELY COUPLED RF DISCHARGE; COMPUTER MODELING; DIRECT CURRENT GLOW DISCHARGES; FLUID MODELING; FLUID MODELS; GAS-DISCHARGE PLASMAS; HYBRID MONTE CARLO; MAGNETRON DISCHARGES; MODELING APPROACH; MOLECULAR DYNAMICS SIMULATIONS; MONTE CARLO COLLISION; MONTE CARLO SIMULATION; PARTICLE-IN-CELL; PARTICLE-IN-CELL MONTE CARLO; PLASMA CHEMISTRIES; PLASMA MODELING; PLASMA-SURFACE INTERACTIONS; SPECTROCHEMICAL ANALYSIS;

CELL MEMBRANES; DYNAMICS; FLUIDS; GAS DISCHARGE TUBES; GLOW DISCHARGES; HYBRID MATERIALS; MOLECULAR DYNAMICS; MONTE CARLO METHODS; PLASMA INTERACTIONS; SIMULATORS; SPECTROSCOPY; SURFACES;

PLASMA DEPOSITION;

EID: 67651204758     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200800207     Document Type: Review

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