Present possibilities of thin-layer analysis by GDOES

Surface and Interface Analysis

Volumn 35, Issue 7, 2003, Pages 575-582

  Hoffmann, Volker ^a   Dorka, Roland ^a   Wilken, Ludger ^a   Hodoroaba, Vasile Dan ^b   Wetzig, Klaus ^a  

^a LISSMRD   (Germany)

^b BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

GDMS; GDOES; Thin layer analysis

Indexed keywords

CHEMICAL ELEMENTS; COMPUTER SIMULATION; CURRENT DENSITY; FLOW OF FLUIDS; GASES; GLOW DISCHARGES; LIGHT REFLECTION; MASS SPECTROMETRY; MOLECULES; OPTICAL DEVICES; OPTIMIZATION; THIN FILMS;

GLOW DISCHARGE MASS SPECTROMETRY; GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY; LIGHT ELEMENTS;

EMISSION SPECTROSCOPY;

EID: 0041966191     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1575     Document Type: Article

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