Calculation of gas heating in direct current argon glow discharges

Journal of Applied Physics

Volumn 87, Issue 12, 2000, Pages 8334-8344

  Bogaerts, Annemie ^a   Gijbels, Renaat ^a   Serikov, Vladimir V ^b  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b NIPPON SHEET GLASS CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000189257     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.373545     Document Type: Article

References (35)

1. R. K. Marcus, Glow Discharge Spectroscopies (Plenum, New York, 1993).
2. R. Payling, D. G. Jones, and A. Bengtson, Glow Discharge Optical Emission Spectrometry (Wiley, Chichester, 1997).
3. A. Bogaerts, M. van Straaten, and R. Gijbels, Spectrochim. Acta B 50, 179 (1995).
4. A. Bogaerts, M. van Straaten, and R. Gijbels, J. Appl. Phys. 77, 1868 (1995).
5. A. Bogaerts, R. Gijbels, and W. J. Goedheer, J. Appl. Phys. 78, 2233 (1995).
6. A. Bogaerts and R. Gijbels, Phys. Rev. A 52, 3743 (1995).
7. A. Bogaerts and R. Gijbels, J. Appl. Phys. 78, 6427 (1995).
8. A. Bogaerts and R. Gijbels, J. Appl. Phys. 79, 1279 (1996).
9. A. Bogaerts, R. Gijbels, and W. J. Goedheer, Anal. Chem. 68, 2296 (1996).
10. A. Bogaerts and R. Gijbels, Anal. Chem. 68, 2676 (1996).
11. A. Bogaerts, R. Gijbels, and J. Vlcek, J. Appl. Phys. 84, 121 (1998).
12. A. Bogaerts, R. Gijbels, and R. J. Carman, Spectrochim. Acta B 53, 1697 (1998).
13. A. Bogaerts, Plasma Sources Sci. Technol. 8, 210 (1999).
14. A. Bogaerts and R. Gijbels, J. Appl. Phys. 86, 4124 (1999).
15. N. P. Ferreira, H. G. C. Human, and L. R. P. Butler, Spectrochim. Acta B 35, 287 (1980).
16. S. M. Rossnagel, J. Vac. Sci. Technol. A 6, 19 (1988).
17. T. Hori, M. D. Bowden, K. Uchino, K. Muraoka, and M. Maeda, J. Vac. Sci. Technol. A 14, 144 (1996).
18. K. Muroaka, K. Uchino, and M. D. Bowden, Plasma Phys. Controlled Fusion 40, 1221 (1998).
19. J. D. Bukowski, D. B. Graves, and P. Vitello, J. Appl. Phys. 80, 2614 (1996).
20. G. M. Petrov and C. M. Ferreira, Phys. Rev. E 59, 3571 (1999).
21. H. M. Urbassek and D. Sibold, J. Vac. Sci. Technol. A 11, 676 (1993).
22. A. Kersch, W. Morokoff, and S. Werner, J. Appl. Phys. 75, 2278 (1994).
23. G. M. Turner, J. Vac. Sci. Technol. A 13, 2161 (1995).
24. V. V. Serikov and K. Nanbu, J. Appl. Phys. 82, 5948 (1997).
25. I. Revel, L. C. Pitchford, and J. P. Boeuf, Poster at the XXIV International Conference on Phenomena in Ionized Gases, Warsaw, Poland, 1999, Proceedings of Contributed Papers, vol. III, p. 39.
26. V. V. Serikov, S. Kawamoto, and K. Nanbu, IEEE Trans. Plasma Sci. 27, 1389 (1999).
27. A. V. Phelps, J. Appl. Phys. 76, 747 (1994).
28. S. S. Sazhin and V. V. Serikov, Planet. Space Sci. 45, 361 (1997).
29. H. F. Winters, H. Coufal, C. T. Rettner, and D. S. Bethune, Phys. Rev. B 41, 6240 (1990).
30. H. Coufal, H. F. Winters, E. Bay, and W. Eckstein, Phys. Rev. B 44, 4747 (1991).
31. D. Hodoroaba (private communication).
32. A. Bogaerts, Ph.D. Dissertation, University of Antwerp, 1996.
33. A. Bogaerts and R. Gijbels, Plasma Phys. Rep. 24, 573 (1998).
34. A. Bogaerts and R. Gijbels, Spectrochim. Acta B 53, 437 (1998).
35. V. Hoffmann, F. Prässler, K. Wetzig, D. Schiel, and R. Jährling, Poster at the 1998 Winter Conference on Plasma Spectrochemistry, Scottsdale, Arizona, 1998.