Effect of hydrogen on the growth of thin hydrogenated amorphous carbon films from thermal energy radicals

Applied Physics Letters

Volumn 88, Issue 14, 2006, Pages

  Neyts, E ^a   Bogaerts, A ^a   Van De Sanden, M C M ^b  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; HYDROGEN; HYDROGENATION; MICROSTRUCTURE; MOLECULAR DYNAMICS; THIN FILMS;

AMORPHOUS CARBON FILMS; ATOM DENSITY; MOLECULAR DYNAMICS SIMULATIONS; THERMAL ENERGY RADICALS;

AMORPHOUS FILMS;

EID: 33646697165     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2193803     Document Type: Article

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