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Volumn 517, Issue 15, 2009, Pages 4413-4418

Influence of polymer porogens on the porosity and mechanical properties of spin coated Ultra Low k dielectrics

Author keywords

GISAXS; Micro structural characterization; SiOCH; Spin on; Thermal curing; ULK; UV

Indexed keywords

GISAXS; MICRO-STRUCTURAL CHARACTERIZATION; SIOCH; SPIN-ON; THERMAL CURING; ULK; UV;

EID: 65449164928     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.02.084     Document Type: Article
Times cited : (17)

References (28)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.