Grazing-incidence small-angle X-ray scattering study of porous dielectrics used in advanced microelectronic interconnections

Journal of Applied Crystallography

Volumn 40, Issue SUPPL. 1, 2007, Pages

  Simon, Jean Paul ^a   Jousseaume, Vincent ^b   Rolland, Guy ^b  

^a UNIV GRENOBLE ALPES   (France)

^b CEA LETI   (France)

Author keywords

Dielectrics; GISAXS; Microelectronics; Ultra low k

Indexed keywords

EID: 34248374476     PISSN: 00218898     EISSN: 16005767     Source Type: Journal    
DOI: 10.1107/S0021889806053180     Document Type: Conference Paper

References (5)

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