SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 495, Issue 1-2, 2006, Pages 124-129

Crosslinking impact of mesoporous MSQ films used in microelectronic interconnections on mechanical properties

(7) Ciaramella, F a Jousseaume, V a Maitrejean, S a Verdier, M b Remiat, B a Zenasni, A a Passemard, G c

a CEA LETI (France)

b UNIV GRENOBLE ALPES (France)

c STMICROELECTRONICS (France)

Author keywords

Crosslinking; FTIR; Low k; Mechanical properties; MSQ; Nanoindentation; Spin on; ULK

Indexed keywords

CORRELATION THEORY; CROSSLINKING; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTEGRATED CIRCUITS; MECHANICAL PROPERTIES; MICROELECTRONICS;

LOW-K; METHYLSILSESQUIOXANE (MSQ); NANOINDENTATION; SPIN-ON; ULK;

THIN FILMS;

EID: 28044444592 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.08.291 Document Type: Conference Paper

Times cited : (41)

References (15)

1
- 0142106901
- M. Fayolle, G. Passemard, O. Louveau, F. Fusalba, and J. Cluzel Microelectron. Eng. 70 2003 255
- (2003) Microelectron. Eng. , vol.70 , pp. 255
- Fayolle, M.¹ Passemard, G.² Louveau, O.³ Fusalba, F.⁴ Cluzel, J.⁵

2
- 28044438679
- M. Verdier, M. Montagna, S. Maîtrejean, and G. Passemard Mater. Res. Soc. Symp. Proc. 795 2004 1
- (2004) Mater. Res. Soc. Symp. Proc. , vol.795 , pp. 1
- Verdier, M.¹ Montagna, M.² Maîtrejean, S.³ Passemard, G.⁴

3
- 28044466636
- To be published
- N. Chérault, G. Carlotti, N. Casanova, P. Gergaud, C. Goldberg, O. Thomas, M. Verdier, To be published in Microelec. Eng. (2005).
- (2005) Microelec. Eng.
- Chérault, N.¹ Carlotti, G.² Casanova, N.³ Gergaud, P.⁴ Goldberg, C.⁵ Thomas, O.⁶ Verdier, M.⁷

4
- 28044446944
- P. Leduc, M. Savoye, S. Maitrejean, D. Scevola, V. Jousseaume, and G. Passemard Proceeding of the International Interconnection Technology Conference 2005
- (2005) Proceeding of the International Interconnection Technology Conference
- Leduc, P.¹ Savoye, M.² Maitrejean, S.³ Scevola, D.⁴ Jousseaume, V.⁵ Passemard, G.⁶

5
- 0003910686
- 2nd ed. Cambridge
- L.J. Gibson, and M.F. Ashby Cellular Solids: Structure and Properties 2nd ed. 1997 Cambridge
- (1997) Cellular Solids: Structure and Properties
- Gibson, L.J.¹ Ashby, M.F.²

6
- 2942685614
- S.Y. Chang, T.-J. Chou, Y.-C. Lu, S.-M. Jang, S.-U. Lin, and M.-S. Liang J. Electrochem. Soc. 151 2004 F146
- (2004) J. Electrochem. Soc. , vol.151
- Chang, S.Y.¹ Chou, T.-J.² Lu, Y.-C.³ Jang, S.-M.⁴ Lin, S.-U.⁵ Liang, M.-S.⁶

7
- 84967801473
- J.A. Theil, J.G. Brace, and R.W. Knoll J. Vac. Sci. Technol. 12 1994 1365
- (1994) J. Vac. Sci. Technol. , vol.12 , pp. 1365
- Theil, J.A.¹ Brace, J.G.² Knoll, R.W.³

8
- 3042606295
- W.C. Oliver, and G.M. Pharr J. Mater. Res. 19 2004 3
- (2004) J. Mater. Res. , vol.19 , pp. 3
- Oliver, W.C.¹ Pharr, G.M.²

9
- 0031236255
- J. Mencik J. Mater. Res. 12 1997 2475
- (1997) J. Mater. Res. , vol.12 , pp. 2475
- Mencik, J.¹

10
- 0036353673
- N.M. Jenne, and A.J. Bushby Mater. Res. Soc. Symp. Proc. 695 2002 73
- (2002) Mater. Res. Soc. Symp. Proc. , vol.695 , pp. 73
- Jenne, N.M.¹ Bushby, A.J.²

11
- 0001296902
- Infrared, Raman and Ultraviolet Spectroscopy
- A.L. Smith Wiley-Inter-science New York
- D.R. Anderson A.L. Smith Infrared, Raman and Ultraviolet Spectroscopy Analysis of Silicones 1974 Wiley-Inter-science New York 250 chapter 10
- (1974) Analysis of Silicones , pp. 250
- Anderson, D.R.¹

12
- 35949033170
- P.N. Sen, and M.F. Thorpe Phys. Rev. B.H. 15 1977 4030
- (1977) Phys. Rev. B.H. , vol.15 , pp. 4030
- Sen, P.N.¹ Thorpe, M.F.²

13
- 84941523965
- G. Lucovsky, J.T. Fitch, D.V. Tsu, and S.S. Kim J. Vac. Sci. Technol., A, Vac. Surf. Films 7 1989 1136
- (1989) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.7 , pp. 1136
- Lucovsky, G.¹ Fitch, J.T.² Tsu, D.V.³ Kim, S.S.⁴

14
- 28044454524
- W. Pliskin Thin Solid Films 2 1968 6
- (1968) Thin Solid Films , vol.2 , pp. 6
- Pliskin, W.¹

15
- 28044445071
- A. Grill, and D. Neumayer J. Appl. Phys. 2003 94
- (2003) J. Appl. Phys. , pp. 94
- Grill, A.¹ Neumayer, D.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.