Ultralow-k nanoporous organosilicate dielectric films imprinted with dendritic spheres

Nature Materials

Volumn 4, Issue 2, 2005, Pages 147-151

  Lee, Byeongdu ^a   Park, Young Hee ^a   Hwang, Yong Taek ^a   Weontae, O H ^a   Yoon, Jinhwan ^a   Ree, Moonhor ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DENDRIMERS; INTEGRATED CIRCUITS; NANOSTRUCTURED MATERIALS; OPTICAL INTERCONNECTS; PERMITTIVITY; POLYCONDENSATION; POROSITY; PYROLYSIS; SILICATES; SPHERES;

DENDRITIC SPHERES; ORGANOSILICATE; POLYMETHYLSILSEQUIOXANE (PMSSQ); POROGENS;

DIELECTRIC FILMS;

EID: 13144268598     PISSN: 14761122     EISSN: None     Source Type: Journal    
DOI: 10.1038/nmat1291     Document Type: Article

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