SCOPUS 정보 검색 플랫폼

Volumn , Issue , 2001, Pages 273-278

Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen

(11) Baklanov, M R a Jehoul, C a Flannery, C M a Mogilnikov, K P a Gore, R a Gronbeck, D a Prokopowicz, G a Sullivan, C a You, Y a Pugliano, N a Gallagher, M a

a IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; CORRELATION THEORY; CROSSLINKING; ELLIPSOMETRY; LASER APPLICATIONS; LIGHT SCATTERING; MACROMOLECULES; MESOPOROUS MATERIALS; MICROPOROSITY; PORE SIZE; POROSIMETERS; SPECTROSCOPIC ANALYSIS;

DYNAMIC LASER LIGHT SCATTERING (DLS); ELLIPSOMETRIC POROSIMETRY (EP); MACROMOLECULAR POROGENS; SURFACE ACOUSTIC WAVE SPECTROSCOPY (SAWS);

DIELECTRIC FILMS;

EID: 0035555202 PISSN: 10480854 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (9)

References (12)

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2
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- Baklanov, M.R.¹ Kondoh, E.² Lin, E.K.³ Gidley, D.W.⁴ Lee, H.-J.⁵ Mogilnikov, K.P.⁶ Sun, J.N.⁷

3
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- Sun, J.-N.¹ Gidley, D.W.² Dull, T.L.³ Frieze, W.E.⁴ Yee, A.F.⁵ Ryan, E.T.⁶ Lin, S.⁷ Wetzel, J.⁸

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5
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6
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- San Francisco
- (2001) MRS Spring Meeting
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8
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9
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- Private communication
- Gidley, D.W.¹

10
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- (2002) Spring MRS
- Flannery, C.M.¹ Baklanov, M.R.² Wittkowski, T.³

11
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- Gidley, D.W.¹ Frieze, W.E.² Dull, T.L.³

12
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- Lin, S.¹ Jin, C.² Lui, L.³ Tsai, M.⁴ Daniels, M.⁵ Gonzalez, A.⁶ Wetzel, J.⁷ Monnig, K.A.⁸ Winebarger, P.A.⁹ Jang, S.¹⁰ Yu, D.¹¹ Liang, M.S.¹²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.