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Journal of Physics D: Applied Physics

Volumn 34, Issue 10, 2001, Pages 1479-1490

Inductively coupled radio frequency methane plasma simulation

(3) Bera, K a Farouk, B a Vitello, P b

a Drexel University (United States)

b LAWRENCE LIVERMORE NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CATHODES; ELECTROMAGNETISM; ETCHING; FILMS; FREQUENCIES; IONS; METHANE; SPUTTERING;

ADSORPTION LAYER REACTION; RADIO FREQUENCY;

PLASMA SIMULATION;

EID: 0035926706 PISSN: 00223727 EISSN: None Source Type: Journal
DOI: 10.1088/0022-3727/34/10/308 Document Type: Article

Times cited : (30)

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