Two-dimensional fluid simulation and langmuir probe measurement of a planar inductively coupled oxygen plasma

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 12 A, 1999, Pages 6890-6895

  Yoon, Hyun Jin ^a   Chung, Tae Hun ^a   Seo, Dong Cheol ^a  

^a Dong A University   (South Korea)

Author keywords

Planar inductively coupled plasma source; Rf oxygen discharge; Two dimensional fluid simulation

Indexed keywords

DENSITY (SPECIFIC GRAVITY); ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRON ENERGY LEVELS; ELECTRONS; FLUIDS; IONIZATION; MATHEMATICAL MODELS; NUMERICAL METHODS; OXYGEN; PRESSURE; TEMPERATURE;

CONTINUITY EQUATIONS; DIELECTRIC ROOF; ELECTRON ENERGY BALANCE EQUATION; LANGMUIR PROBE MEASUREMENT; PLANAR INDUCTIVELY COUPLED OXYGEN PLASMA; POISSON EQUATION; TWO DIMENSIONAL FLUID SIMULATION;

PLASMA SOURCES;

EID: 0033352377     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.6890     Document Type: Article

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