Mode transitions in low pressure rare gas cylindrical ICP discharge studied by optical emission spectroscopy

Journal of Physics D: Applied Physics

Volumn 37, Issue 20, 2004, Pages 2827-2840

  Czerwiec, T ^a,b   Graves, D B ^a  

^a University of California   (United States)

^b INSTITUT JEAN LAMOUR   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRONIC EQUIPMENT; EMISSION SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; MATHEMATICAL MODELS; MOLECULAR BEAM EPITAXY; PROBABILITY; VACUUM;

ELECTRONIC PARAMETERS; MODE TRANSITIONS; OPTICAL EMISSION SPECTROSCOPY; SPIRAL COILS;

INERT GASES;

EID: 7044274672     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/20/009     Document Type: Article

References (49)

1. Hittorf P C 1884 Ann. Phys. 21 90
2. Thomson J J 1891 Phil. Mag. 32 321
3. Keller J H 1996 Plasma Sources Sci. Technol. 5 166
4. Graves D B 1994 IEEE Trans. Plasma Sci 22 31
5. Imai F, Kunimori K and Nozoye H 1995 J. Vac. Sci. Technol. A 13 2508
6. Voulot D, McCullough R W, Thompson W R, Burns D, Geddes J, Gosimini G J, Nelson E, Chow P P and Klaassen J 1998 J. Vac. Sci. Technol. A. 16 3434
7. El-Fayoumi I M, Jones I R and Turner M M 1998 J. Phys. D: Appl. Phys. 31 3082
8. Turner M M and Lieberman M A 1999 Plasma Sources Sci. Technol. 8313
9. MacKinnon K A 1929 Phil. Mag. 8 605
10. Tang X and Manos D M 2000 J. Vac. Sci. Technol. A18 1359
11. Kortshagen U, Gibson N B and Lawler J E 1996 J. Phys. D: Appl. Phys. 29 1224
12. Cunge G, Crowley B, Vender D and Turner M M 1999 Plasma Sources Sci. Technol. 8 576
13. Turner M M and Lieberman M A 1999 Plasma Sources Sci. Technol. 8 313
14. Xu S, Ostrikov K N, Luo W and Lee S 2000 J. Vac. Sci. Technol. A 18 2185
15. Ostrikov K N, Xu S and Yu M Y 2000 J. Appl. Phys. 88 2268
16. Xu S, Ostrikov K N, Li Y, Tsakadze E L and Jones I R 2001 Phys. Plasmas 8 2549
17. Montaser A and Golightly D W (ed) 1987 Inductively coupled plasma in analytical atomic spectrometry (New York: VCH)
18. Smith H, Linch W A and Bilberry N 1931 Phys. Rev. 37 1091
19. Chandrakar K 1978 J. Phys. D: Appl. Phys. 11 1809
20. Malyshev M V and Donnelly V M 1997 J. Vac. Sci. Technol. A 15 550
21. Malyshev M V and Donnelly V M 1999 Phys. Rev. E 60 6016
22. Bruce M R, Layne W B, Whitehead C A and Keto T W 1990 J. Chem. Phys. 92 2917
23. Sadeghi N, Setzer D W, Francis A, Czarnetzki U and Dobele H F 2001 J. Chem. Phys. 115 3144
24. Dzierzega K, Volz U, Nave G and Griesmann U 2000 Phys. Rev. A 62 22505
25. Whitehead C A, Pournasr H, Bruce M R, Cai H, Cohel J, Layne W B and Keto J W 1995 J. Chem. Phys. 102 1965
26. Schmitt A and Schmoranzer H 1999 Phys. Lett. A 263 193
27. Wiese W L, Brault J W, Danzmann K, Heibig V and Koch M 1989 Unified set of atomic transition probabilities for neutral argon Phys. Rev. A 39 2461
28. Amorim J, Maciel H S and Suadano J P 1991 J. Vac. Sci. Technol. B 9 362
29. Stewart R S and Smith D J 2002 J. Phys. D: Appl. Phys. 35 1777-87
30. Petrovic Z L, Bzenic S, Jovanovic J and Djurovic S 1995 J. Phys. D: Appl. Phys. 28 2287
31. Boffard J B, Piech G A, Gehrke M F, Lagus M A, Anderson L W and Lin C C 1996 J. Phys. B: At. Mol. Opt. Phys. 29 L795
32. Boffard J B, Piech G A, Gehrke M F, Anderson L W and Lin C C 1999 Phys. Rev. A 59 2749
33. Moshkalyov S A, Steen F G, Gomez S and Graham W G 1999 Appl. Phys. Lett. 75 328
34. Chilton J E, Stewart M D and Lin C C 2000 Phys. Rev. A 62 32714
35. Mityureva A A, Penkin N P and Smirnov V V 1989 Opt. Spectrosc. 67 461
36. Dasgupta A, Bartchat K, Vaid D, Grum-Grzhimaolo A N, Madisson D H, Blaha M and Giuliani J L 2002 Phys. Rev. A 65 42724
37. Fon J T and Lin C C 1998 Phys. Rev. A 58 4603
38. Chilton J E, Boffard J B, Schappe R S and Lin C C 1998 Phys. Rev. A 57 267
39. Feltsan P V and Zapesochnyi I P 1967 Ukr. Fiz. Th. 12 633
40. Tadokoro M, Hirata H, Nakano N, Petrovic Z Lj and Makabe T 1998 Phys. Rev. E 5 7823
41. Okigawa A, Petrovic Z Lj, Tadokoro M, Makabe T, Nakano N and Itoh A 1996 Appl. Phys. Lett. 69 2644
42. Ferreira C M, Loureiro J and Ricard A1985 J. Appl. Phys. 5782
43. Mityureva A A and Smirnov V V 1994 J. Phys. B: At. Mol. Opt. Phys. 27 1869
44. Hyman H A 1978 Phys. Rev. A18 441
45. Bartschat K and Zeman V 1999 Phys. Rev. A 59 R2552
46. Lymberopoulos D P and Economou D J 1993 J. Appl. Phys. 73 3668
47. Hyman H A 1979 Phys. Rev. A 20 20
48. Kolts J H and Setzer D W 1978 J. Chem. Phys. 68 4848
49. Velazco J E, Kolts J H and Setzer D W 1978 J. Chem. Phys. 69 4357