A theoretical formula of e-h discharge transition power in a transformer-coupled discharge

IEEE Transactions on Plasma Science

Volumn 26, Issue 2, 1998, Pages 190-197

  Yoon, N S ^a   Kirn, B C ^a   Yang, J G ^a   Hwang, S M ^a  

^a Korea Basic Science Institute (KBSI)   (South Korea)

Author keywords

E h transition; ICP; TCP; Transformer coupled discharge

Indexed keywords

ARGON; ELECTRIC DISCHARGES; ELECTRIC FIELD EFFECTS; MATHEMATICAL MODELS; PLASMA HEATING;

INDUCTIVELY COUPLED PLASMAS (ICP); TRANSFORMER COUPLED PLASMAS (TCP);

PLASMA THEORY;

EID: 0032050034     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.669626     Document Type: Article

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