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Volumn 48, Issue 7, 2009, Pages 3073-3079

Synthesis and characterization of siloxy, aminoxy, and oxo complexes from the reaction of a tantalum amide silyl complex with oxygen

Author keywords

[No Author keywords available]

Indexed keywords

AMIDE; ORGANOMETALLIC COMPOUND; ORGANOSILICON DERIVATIVE; OXIDE; OXYGEN; TANTALUM;

EID: 64349089492     PISSN: 00201669     EISSN: None     Source Type: Journal    
DOI: 10.1021/ic802380u     Document Type: Article
Times cited : (22)

References (84)
  • 27
    • 0033344207 scopus 로고    scopus 로고
    • 2 and High-κ Materials for ULSI Gate Dielectrics).
    • 2 and High-κ Materials for ULSI Gate Dielectrics).
  • 43
    • 85081493840 scopus 로고
    • For metal silyl and related chemistry, see, e.g, a, Patai, S, Rappoport, Z, Eds, Wiley: New York, Chapters 9 and 10
    • For metal silyl and related chemistry, see, e.g. ,(a) Tilley, T. D. In The Silicon-Heteroatom Bond; Patai, S., Rappoport, Z.; Eds.; Wiley: New York, 1991; Chapters 9 and 10.
    • (1991) The Silicon-Heteroatom Bond
    • Tilley, T.D.1
  • 44
    • 0000171774 scopus 로고    scopus 로고
    • Rappoport, Z, Apeloig, Y, Eds, Wiley: New York
    • (b) Eisen, M. S. In The Chemistry of Organic Silicon Compounds Vol. 2; Rappoport, Z.; Apeloig, Y., Eds.; Wiley: New York, 1998,Pt. 3, p 2037.
    • (1998) The Chemistry of Organic Silicon Compounds , vol.2 , Issue.PART. 3 , pp. 2037
    • Eisen, M.S.1
  • 45
    • 0000806201 scopus 로고
    • Larson, G, Ed, JAI Press: Greenwich, CT
    • (c) Corey, J. Y. In Advances in Silicon Chemistry; Larson, G., Ed.; JAI Press: Greenwich, CT, 1991; Vol. 1, p 327.
    • (1991) Advances in Silicon Chemistry , vol.1 , pp. 327
    • Corey, J.Y.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.