Nitridation and reoxidation of high-k metal oxide thin films using argon excimer sources

Physica Status Solidi (A) Applications and Materials Science

Volumn 203, Issue 3, 2006, Pages

  Yu, J J ^a   Boyd, I W ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON EXCIMERS; NITRIDATION; REOXIDATION;

ARGON; CAPACITANCE; ELECTRIC BREAKDOWN; EXCIMER LASERS; NITRIDING; OXIDATION;

THIN FILMS;

EID: 33644645916     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200521134     Document Type: Article

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