Formation of several-micrometer-thick polycrystalline silicon films on soda lime glass by flash lamp annealing

Japanese Journal of Applied Physics

Volumn 47, Issue 11, 2008, Pages 8239-8242

  Ohdaira, Keisuke ^a   Fujiwara, Tomoko ^a   Endo, Yohei ^a   Nishizaki, Shogo ^a   Matsumura, Hideki ^a  

^a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Amorphous silicon; Crystallization; Flash lamp annealing; Polycrystalline silicon; Soda lime glass; Solar cell

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS MATERIALS; ANNEALING; CHEMICAL VAPOR DEPOSITION; CHROMIUM; CRYSTALLIZATION; FORMING; GLASS; LIME; NANOCRYSTALLINE ALLOYS; NONMETALS; OXIDE MINERALS; PHOTOVOLTAIC CELLS; PLASMAS; POLYCRYSTALLINE MATERIALS; POLYSILICON; QUARTZ; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SOLAR CELLS; SOLAR EQUIPMENT; SUBSTRATES; THERMAL CONDUCTIVITY; THICKNESS MEASUREMENT;

A-SI FILMS; CAT-CVD; CHEMICAL VAPORS; DIFFUSION LENGTHS; EFFECTIVE MASSES; FLASH LAMP ANNEALING; GLASS SUBSTRATES; HIGH CRYSTALLINITY; POLYCRYSTALLINE SILICON; POLYCRYSTALLINE SILICON (LTPS) FILMS; QUARTZ GLASSES; QUARTZ SUBSTRATES; RAMAN SPECTRUM; SI FILMS; SI SOLAR CELLS; SODA LIME GLASS; SOLAR CELL;

AMORPHOUS SILICON;

EID: 58749108649     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.8239     Document Type: Article

References (42)

1. M. Yamaguchi, Y. Ohshita, K. Arafune, H. Sai, and M. Tachibana: Sol. Energy 80 (2006) 104, and references therein.
2. S. Hegedus: Prog. Photovoltaics 14 (2006) 393, and references therein.
3. A. G. Aberle: Proc. IEEE 4th World Conf. Photovoltaic Energy Conversion, 2006, p. 1481.
4. A. H. Mahan, S. P. Ahrenkiel, B. Roy, R. E. I. Schropp, H. Li, and D. S. Ginley: Proc. IEEE 4th World Conf. Photovoltaic Energy Conversion, 2006, p. 1612.
5. T. Matsuyama, M. Tanaka, S. Tsuda, S. Nakano, and Y. Kuwano: Jpn. J. Appl. Phys. 32 (1993) 3720.
6. M. J. Keevers, T. L. Young, U. Schubert, and M. A. Green: Proc. 22nd European Photovoltaic Solar Energy Conf., 2007, p. 1783.
7. I. Gordon, D. Van Gestel, L. Camel, G. Beaucarne, J. Poortmans, K. Y. Lee, P. Dogan, B. Gorka, C. Becker, F. Fenske, B. Rau, S. Gall, B. Rech, J. Plentz, F. Falk, and D. Le Bellac: Proc. 22nd European Photovoltaic Solar Energy Conf., 2007, p. 1890.
8. A. A. D. T. Adikaari, N. K. Mudugamuwa, and S. R. P. Silva: Appl. Phys. Lett. 90 (2007) 171912.
9. I. Steinbach and M. Apel: Mater. Sci. Eng. A 449-451 (2007) 95.
10. S. Higashi, H. Kaku, H. Taniguchi, H. Murakami, and S. Miyazaki: Thin Solid Films 487 (2005) 122.
11. S. Higashi, H. Kaku, T. Okada, H. Murakami, and S. Miyazaki: Jpn. J. Appl. Phys. 45 (2006) 4313.
12. H. Kaku, S. Higashi, H. Taniguchi, H. Murakami, and S. Miyazaki: Appl. Surf. Sci. 244 (2005) 8.
13. S. Higashi, H. Kaku, H. Murakami, S. Miyazaki, H. Watanabe, N. Ando, and T. Sameshima: Jpn. J. Appl. Phys. 44 (2005) L108.
14. H. Jia and H. Shirai: Jpn. J. Appl. Phys. 44 (2005) 837.
15. M. Ryo, Y. Sakurai, T. Kobayashi, and H. Shirai: Jpn. J. Appl. Phys. 45 (2006) 8484.
16. Y. Sakurai, T. Kobayashi, Y. Hasegawa, and H. Shirai: Jpn. J. Appl. Phys. 44 (2005) L749.
17. H. Matsumura, K. Ohdaira, M. Fukuda, Y. Abe, N. Usami, K. Nakajima, T. Karasawa, and T. Torikai: Proc. 21st European Photovoltaic Solar Energy Conf., Dresden, 2006, p. 1594.
18. K. Ohdaira, S. Nishizaki, Y. Endo, T. Fujiwara, N. Usami, K. Nakajima, and H. Matsumura: Jpn. J. Appl. Phys. 46 (2007) 7198.
19. K. Ohdaira, Y. Endo, T. Fujiwara, S. Nishizaki, and H. Matsumura: Jpn. J. Appl. Phys. 46 (2007) 7603.
20. K. Ohdaira, Y. Abe, M. Fukuda, S. Nishizaki, N. Usami, K. Nakajima, T. Karasawa, T. Torikai, and H. Matsumura: Thin Solid Films 516 (2008) 600.
21. K. Ohdaira, Y. Endo, T. Fujiwara, S. Nishizaki, K. Nishioka, H. Matsumura, T. Karasawa, and T. Torikai: Proc. 22nd European Photovoltaic Solar Energy Conf., Milan, 2007, p. 1961.
22. K. Ohdaira, T. Fujiwara, Y. Endo, S. Nishizaki, K. Nishioka, and H. Matsumura: Proc. 17th Int. Photovoltaic Science and Engineering Conf., 2007, p. 1326.
23. T. Fujiwara, Y. Endo, S. Nishizaki, K. Ohdaira, K. Nishioka, and H. Matsumura: Proc. 17th Int. Photovoltaic Science and Engineering Conf., 2007, p. 1157.
24. Y. Endo, T. Fujiwara, S. Nishizaki, K. Ohdaira, K. Nishioka, and H. Matsumura: Proc. 17th Int. Photovoltaic Science and Engineering Conf., 2007, p. 319.
25. F. Terai, S. Matsunaka, A. Tauchi, C. Ichikawa, T. Nagatomo, and T. Homma: J. Electrochem. Soc. 153 (2006) H147.
26. B. Pétz, L. Dobos, D. Panknin, W. Skorupa, C. Lioutas, and N. Vouroutzis: Appl. Surf. Sci. 242 (2005) 185.
27. M. Smith, R. McMahon, M. Voelskow, D. Panknin, and W. Skorupa: J. Cryst. Growth 285 (2005) 249.
28. B. Elvers, S. Hawkins, M. Ravenscroft, J. F. Rounsaville, and G. Schulz: Ullmann's Encyclopedia of Industrial Chemistry (VCH, Weinheim, 1989) Vol. A12.
29. V. E. Khazanov, Yu. I. Kolesov, and N. N. Trofimov: Fibre Science and Technology (Chapman and Hall, London, 1995).
30. J. Oishi and T. Kimura: Metrologia 5 (1969) 50.
31. A. S. Korhonen, P. L. Jones, and F. H. Cocks: Mater. Sci. Eng. 49 (1981) 127.
32. N. M. Poley and H. L. Whitaker: J. Vac. Sci. Technol. 11 (1974) 114.
33. R. Berriche and D. L. Kohlstedt: Materials Developments in Microelectronic Packaging Conf. Proc., 1991, p. 47.
34. N. Jiang and J. Silcox: J. Appl. Phys. 87 (2000) 3768.
35. H. Kiyohashi, N. Hayakawa, S. Aratani, and H. Masuda: High Temp. High Pressures 34 (2002) 167.
36. J. Huang and P. K. Gupta: J. Non-Cryst. Solids 139 (1992) 239.
37. I. Sawai and S. Inoue: J. Soc. Chem. Ind. Jpn. 41 (1938) 663 [in Japanese].
38. V. K. Bityukov and V. A. Petrov: High Temp. 38 (2000) 293.
39. S. Inaba, S. Oda, and K. Morinaga: J. Non-Cryst. Solids 325 (2003) 258.
40. Y. Kikuchi, H. Sudo, and N. Kuzuu: J. Appl. Phys. 82 (1997) 4121.
41. Y. Okada and Y. Tokumaru: J. Appl. Phys. 56 (1984) 314.
42. H. Campbell and P. M. Fauchet: Solid State Commun. 58 (1986) 739.