Monte-Carlo simulation of ionisation in self-induced ion plating (SIIP)

Surface and Coatings Technology

Volumn 201, Issue 3-4, 2006, Pages 1845-1851

  Contino, Antonella ^a   Feldheim, Véronique ^a   Lybaert, Paul ^a   Deweer, Benoît ^b   Cornil, Hugues ^b  

^a FACULTÉ POLYTECHNIQUE DE MONS   (Belgium)

^b ArcelorMittal Gent   (Belgium)

Author keywords

Ion plating; Ionisation; Magnetron; Monte Carlo; Sputtering; Vacuum evaporation

Indexed keywords

COMPUTER SIMULATION; HEAT FLUX; ION BOMBARDMENT; IONIZATION; MAGNETRON SPUTTERING; MONTE CARLO METHODS;

HEAT FLUX DISTRIBUTION; METALLIC TARGET; SELF-INDUCED ION PLATING (SIIP); VACUUM EVAPORATION;

STEEL;

COMPUTER SIMULATION; HEAT FLUX; ION BOMBARDMENT; IONIZATION; MAGNETRON SPUTTERING; MONTE CARLO METHODS; STEEL;

EID: 33748528959     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.03.009     Document Type: Article

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