Prediction of the evolution of the erosion profile in a direct current magnetron discharge

Journal of Applied Physics

Volumn 86, Issue 6, 1999, Pages 2984-2989

  Okazawa, Katsunori ^a   Shidoji, Eiji ^b   Makabe, Toshiaki ^a  

^a KEIO UNIVERSITY   (Japan)

^b ASAHI GLASS CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000946803     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371158     Document Type: Article

References (18)

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