Computational simulations on electron orbits in the magnetron sputtering plasmas

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 1035-1038

  Ido, Shunji ^a   Nakamura, Kosuke ^a  

^a SAITAMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATOMS; COMPUTER SIMULATION; GLOW DISCHARGES; IONIZATION; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; PLASMAS; THREE DIMENSIONAL;

ELECTRON ORBITS; IONIZATION POINTS; MAGNETRON SPUTTERING PLASMAS; NEUTRAL ARGON GAS ATOMS; PLASMA DISTRIBUTION; PLASMA GENERATION POINTS; THREE DIMENSIONAL PARTICLE ORBIT SIMULATION;

ELECTRON ENERGY LEVELS;

EID: 0030172658     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00119-4     Document Type: Article

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