Simulation to improve the magnetic field in the straight section of the rectangular planar DC magnetron

Vacuum

Volumn 82, Issue 6, 2008, Pages 657-663

  Qiu, Qingquan ^a   Li, Qingfu ^a   Su, Jingjing ^a   Jiao, Yu ^b   Finely, Jim ^b  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b PPG INDUSTRIES   (United States)

Author keywords

Erosion; Magnetic field; Magnetron sputtering; Particle simulation

Indexed keywords

COMPUTER SIMULATION; EROSION; GAUSSIAN DISTRIBUTION; MAGNETIC FIELDS;

ENERGETIC ELECTRONS; MAGNET STRUCTURES; TARGET UTILIZATION;

MAGNETRON SPUTTERING;

EID: 38849150356     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.10.006     Document Type: Article

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