Extracting the relative dielectric constant for "high-κ layers" from CV measurements - Errors and error propagation

Microelectronics Reliability

Volumn 47, Issue 4-5 SPEC. ISS., 2007, Pages 678-681

  Buiu, O ^a   Hall, S ^a   Engstrom, O ^b   Raeissi, B ^b   Lemme, M ^c   Hurley, P K ^d   Cherkaoui, K ^d  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^c AMO GMBH   (Germany)

^d UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; MEASUREMENT ERRORS; MOS CAPACITORS; SILICON; VOLTAGE MEASUREMENT;

ERROR PROPAGATION; TRANSITION LAYERS; VALUE EXTRACTION;

PERMITTIVITY;

EID: 34247097018     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2007.01.006     Document Type: Article

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