Sensor for monitoring plasma parameters

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5339, Issue , 2004, Pages 415-426

  Bol'shakov, Alexander A ^a,b   Cruden, Brett A ^a,c   Sharma, Surendra P ^a  

^a NASA AMES RESEARCH CENTER   (United States)

^b ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

^c ELORET CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DATA ACQUISITION; ION IMPLANTATION; MICROELECTRONICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SEMICONDUCTOR LASERS; SPUTTERING;

2-D SIMULATION; GAS TEMPERATURE; OPTICAL DIAGNOSTICS; PLASMA PROCESSING;

OPTICAL SENSORS;

EID: 5444236993     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.528991     Document Type: Conference Paper

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