Transport of argon ions in an inductively coupled high-density plasma reactor

Applied Physics Letters

Volumn 70, Issue 7, 1997, Pages 835-837

  Sadeghi, N ^a   Van De Grift, M ^b   Vender, D ^b   Kroesen, G M W ^b   De Hoog, F J ^b  

^a UNIV GRENOBLE ALPES   (France)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006412760     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118218     Document Type: Article

References (16)

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