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Volumn 65, Issue 4, 2002, Pages
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Nonlocal electron kinetics and excited state densities in a magnetron discharge in argon
a,b b a c a a |
Author keywords
[No Author keywords available]
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Indexed keywords
APPROXIMATION THEORY;
DIFFUSION;
ELECTRONS;
MAGNETIC FIELDS;
MATHEMATICAL MODELS;
PROBABILITY;
PROBLEM SOLVING;
SEMICONDUCTOR LASERS;
BIBERMAN-HOLSTEIN EQUATION;
CYLINDRICAL MAGNETRON DISCHARGE (CMD);
PARTICLE DENSITIES;
RADIATION TRANSPORT;
ARGON;
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EID: 41349113132
PISSN: 15393755
EISSN: 15502376
Source Type: Journal
DOI: 10.1103/PhysRevE.65.046401 Document Type: Article |
Times cited : (16)
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References (22)
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