A microcantilever-based picoliter droplet dispenser with integrated force sensors and electroassisted deposition means

Journal of Microelectromechanical Systems

Volumn 17, Issue 5, 2008, Pages 1239-1253

  Leïchlé, Thierry ^a,b   Lishchynska, Maryna ^c   Mathieu, Fabrice ^a   Pourciel, Jean Bernard ^a   Saya, Daisuke ^a   Nicu, Liviu ^a  

^a LAAS CNRS   (France)

^b INSTITUTE OF PHYSICS   (Taiwan)

^c UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Droplet; Electrodeposition; Electrowetting; Microcantilever; Piezoresistor; Surface patterning

Indexed keywords

COMPOSITE MICROMECHANICS; DISPENSERS; DROP FORMATION; DROPS; ELECTRON TUBES; FLUID MECHANICS; INDUSTRIAL APPLICATIONS; NETWORKS (CIRCUITS); SENSOR NETWORKS; SENSORS; SILICON;

DROPLET; ELECTRODEPOSITION; ELECTROWETTING; MICROCANTILEVER; PIEZORESISTOR; SURFACE PATTERNING;

CHEMICAL SENSORS;

EID: 53649106354     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.927745     Document Type: Article

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