SCOPUS 정보 검색 플랫폼

Volumn 123-124, Issue , 2005, Pages 23-29

Si-piezoresistive microcantilevers for highly integrated parallel force detection applications

Author keywords

Integration; Microcantilevers; Parallel detection; Piezoresistivity

Indexed keywords

ATOMIC FORCE MICROSCOPY; FORCE MEASUREMENT; PIEZOELECTRICITY; READOUT SYSTEMS; SILICON;

FORCE SENSORS; MICROCANTILERS; MICRODEVICES; PARALLEL OPERATION;

SENSORS;

EID: 24944471683 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/j.sna.2005.04.031 Document Type: Conference Paper

Times cited : (24)

References (10)

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3
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.