A closed-loop MEMS-based spotter integrating position sensors with nanometric precision for the control of droplet uniformity

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 730-733

  Leïchlé, Thierry ^a   Saya, Daisuke ^a   Pourciel, Jean Bernard ^a   Mathieu, Fabrice ^a   Bergaud, Christian ^b   Nicu, Liviu ^a  

^a LAAS CNRS   (France)

^b Centre National de la Recherche Scientifique   (Japan)

Author keywords

Closed loop system; Microcantilevers; Picoliter droplet deposition; Piezoresistive sensors

Indexed keywords

BIOASSAY; BIOCHIPS; COMPOSITE MICROMECHANICS; DROP FORMATION; DROPS; MEMS; MICROARRAYS; MICROELECTROMECHANICAL DEVICES; MOLECULES; NEMS; NUCLEIC ACIDS; OPTICAL DESIGN; ORGANIC ACIDS; PHOTORESISTS;

(2+1) DIMENSIONS; (I ,J) CONDITIONS; BIOARRAYS; BIOCHIP; CANTILEVER ARRAYS; CLOSED LOOPS; CONTACT TIME; DROP SIZES; FLUORESCENCE SIGNALING; FORCE SENSING CANTILEVERS; INTERNATIONAL CONFERENCES; MICRO ARRAYS; MOLECULAR SYSTEMS; NANOMETRIC; OPTICAL SET UP; POSITION MONITORING; POSITION SENSORS; SPATIAL POSITIONING; SURFACE WETTABILITY;

FLUID MECHANICS;

EID: 46149113932     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334883     Document Type: Conference Paper

References (6)

1. V. Espina, A. I. Mehta, M. E. Winters, V. Calvert, J. Wulfkuhle, E. F. Petricoin III, and L. A. Liotta, "Protein microarrays: molecular profiling technologies for clinical specimens," Proteomics, 3 (2003), pp. 2091-2100.
2. TeleChem International, Inc. http://arrayit.com.
3. J. G. F. Tsai, Z. Chen, S. Nelson, C.-J. Kim, "A silicon-micromachined pin for contact droplet printing," Proc. IEEE MEMS 2003, pp. 295-298.
4. T. Leïchlé, M. M. Silvan, P. Belaubre, A. Valsesia, G. Ceccone, F. Rossi, D. Saya, J.-B. Pourciel, L. Nicu, and C. Bergaud, "Nanostructuring surfaces with conjugated silica colloids deposited using silicon-based microcantilevers," Nanoiechnology, 16 (2005), pp. 525-531.
5. P. Belaubre, J.-B. Pourciel, D. Saya, T. Leïchlé, F. Mathieu, L. Nicu, and C. Bergaud, "First step towards a fully automated trim control for liquid deposition device at the microscale using piezoresistive cantilevers row," Proc. Transducers '05, pp. 648-651.
6. J.-B. Pourciel, L. Jalabert, and T. Masuzawa, "SDAPPLIN, a method for 2D profiling on high aspect-ratio microstructures: Improvement for 3D surfacing," Japan-USA Symposium on Flexible Automation, Hiroshima, Japan, July 2002, vol. 1, pp. 553-559.