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Volumn 15, Issue 11, 2007, Pages 6900-6907

Fabrication and characterization of microlens arrays using a cantilever-based spotter

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ATOMIC FORCE MICROSCOPY; MACH-ZEHNDER INTERFEROMETERS; ORGANIC POLYMERS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS;

EID: 34249650224     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.006900     Document Type: Article
Times cited : (37)

References (19)
  • 2
    • 33745199603 scopus 로고    scopus 로고
    • Comparing glass and plastic refractive microlenses fabricated with different technologies
    • H Ottevaere et al., "Comparing glass and plastic refractive microlenses fabricated with different technologies," J. Opt. A: Pure Appl. Opt. 8, S407-S429 (2006).
    • (2006) J. Opt. A: Pure Appl. Opt , vol.8
    • Ottevaere, H.1
  • 3
    • 84975664464 scopus 로고
    • Technique for monolithic fabrication of microlens arrays
    • Z. Popovic et al., "Technique for monolithic fabrication of microlens arrays," Appl. Opt. 27, 1281-1284 (1988).
    • (1988) Appl. Opt , vol.27 , pp. 1281-1284
    • Popovic, Z.1
  • 4
    • 0036648327 scopus 로고    scopus 로고
    • Two dimensional plastic microlens arrays by deep lithography with protons: Fabrication and characterization
    • H. Ottevaere et al, "Two dimensional plastic microlens arrays by deep lithography with protons: fabrication and characterization," J. Opt. A: Pure Appl. Opt. 4, S22-S28 (2002).
    • (2002) J. Opt. A: Pure Appl. Opt , vol.4
    • Ottevaere, H.1
  • 5
    • 0031277052 scopus 로고    scopus 로고
    • Fabrication and characterization of microlenses realized by a modified LIGA process
    • P. Ruther et al., "Fabrication and characterization of microlenses realized by a modified LIGA process," Pure Appl. Opt. 6, 643-653 (1997).
    • (1997) Pure Appl. Opt , vol.6 , pp. 643-653
    • Ruther, P.1
  • 6
    • 0034504576 scopus 로고    scopus 로고
    • Fabrication of microlenses by direct photo-induced crosslinkikng polymerization
    • C. Croutxé-Barghorn et al., "Fabrication of microlenses by direct photo-induced crosslinkikng polymerization," Appl. Surf. Sci. 168, 89-91 (2000).
    • (2000) Appl. Surf. Sci , vol.168 , pp. 89-91
    • Croutxé-Barghorn, C.1
  • 7
    • 0028498031 scopus 로고
    • Microjet fabrication of microlens arrays
    • D. L. MacFarlane et al., "Microjet fabrication of microlens arrays," IEEE Photon. Technol. Lett., 6, no9, (1994).
    • (1994) IEEE Photon. Technol. Lett , vol.6 , Issue.NO9
    • MacFarlane, D.L.1
  • 9
    • 33746689543 scopus 로고
    • Direct writing of microlenses in polycarbonate with excimer laser ablation
    • K. Naessens et al., "Direct writing of microlenses in polycarbonate with excimer laser ablation," IEEE Photon. Technol. Lett. 6, 1112-1114 (1994).
    • (1994) IEEE Photon. Technol. Lett , vol.6 , pp. 1112-1114
    • Naessens, K.1
  • 10
    • 0001570505 scopus 로고
    • Fabrication of continuous relief micro-optical elements by direct laser writing in photoresists
    • M. T. Gale et al., "Fabrication of continuous relief micro-optical elements by direct laser writing in photoresists," Opt. Eng. 33, 3556-3566 (1994).
    • (1994) Opt. Eng , vol.33 , pp. 3556-3566
    • Gale, M.T.1
  • 11
    • 0027660674 scopus 로고
    • Realization of micro-optic and integrated optic components by electron-beam-lithographic surface profiling and ion exange in glass
    • E.-B. Kley et al., "Realization of micro-optic and integrated optic components by electron-beam-lithographic surface profiling and ion exange in glass," Int. J. Optoelectron. 8, 513-527 (1993).
    • (1993) Int. J. Optoelectron , vol.8 , pp. 513-527
    • Kley, E.-B.1
  • 12
    • 33646433446 scopus 로고    scopus 로고
    • Nano Fountain Pen Manufacture of Polymer Lenses for Nano-biochip Applications
    • M. Sokuler and L. A. Gheber, "Nano Fountain Pen Manufacture of Polymer Lenses for Nano-biochip Applications," Nano Lett. 6, 848-853 (2006).
    • (2006) Nano Lett , vol.6 , pp. 848-853
    • Sokuler, M.1    Gheber, L.A.2
  • 13
    • 33746729878 scopus 로고    scopus 로고
    • Design and fabrication of polymer microlenses arrays for VCSELs using a cantilever based microsystem
    • V. Bardinal et al., "Design and fabrication of polymer microlenses arrays for VCSELs using a cantilever based microsystem," Proc. SPIE 6185, 618510 (2006).
    • (2006) Proc. SPIE , vol.6185 , pp. 618510
    • Bardinal, V.1
  • 14
    • 1642484962 scopus 로고    scopus 로고
    • Cantilever-based microsystem for contact and non-contact deposition of picoliter biological samples
    • Sens.Acta. A: Physical
    • P. Belaubre et al., "Cantilever-based microsystem for contact and non-contact deposition of picoliter biological samples," Sens.Acta. A: Physical, 110, 130-135 (2004).
    • (2004) , vol.110 , pp. 130-135
    • Belaubre, P.1
  • 15
    • 27344456157 scopus 로고    scopus 로고
    • Nanoimprint process using epoxy-siloxane low viscosity pre-polymer
    • B. Viallet et al., "Nanoimprint process using epoxy-siloxane low viscosity pre-polymer," J. Vac. Sci. Technol. B, 23, 72-75 (2005).
    • (2005) J. Vac. Sci. Technol. B , vol.23 , pp. 72-75
    • Viallet, B.1
  • 17
    • 85177498268 scopus 로고    scopus 로고
    • H. Ottevaere and H. Thienpont, Refractive optical microlenses: an introduction to nomenclature and characterization techniques, Encyclopedia of Modern Optics, 4, pp. 21-43, ed (Robert D. Guenther, Duncan G. Steel and Leopold Bayvel, Elsevier, Oxford, 2004).
    • H. Ottevaere and H. Thienpont, "Refractive optical microlenses: an introduction to nomenclature and characterization techniques, Encyclopedia of Modern Optics, 4, pp. 21-43, ed (Robert D. Guenther, Duncan G. Steel and Leopold Bayvel, Elsevier, Oxford, 2004).
  • 19
    • 34249741814 scopus 로고    scopus 로고
    • Optical components with small dimensions
    • Wiley-VCH, Weinheim
    • S. Sinzinger and J. Jahns, "Optical components with small dimensions," Microoptics (Wiley-VCH, Weinheim, 1999).
    • (1999) Microoptics
    • Sinzinger, S.1    Jahns, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.