Liquid loading of silicon-based cantilevers using electrowetting actuation for microspotting applications

Sensors and Actuators, A: Physical

Volumn 132, Issue 2, 2006, Pages 590-596

  Leïchlé, Thierry ^a   Saya, Daisuke ^a   Pourciel, Jean Bernard ^a   Mathieu, Fabrice ^a   Nicu, Liviu ^a   Bergaud, Christian ^b  

^a LAAS CNRS   (France)

^b Centre National de la Recherche Scientifique   (Japan)

Author keywords

Electrowetting; Liquid loading; Microcantilevers; Microspotting

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; LIQUIDS; SILICON; SULFUR COMPOUNDS;

ELECTROWETTING; LIQUID LOADING; MICROCANTILEVERS; MICROSPOTTING;

SILICON WAFERS;

EID: 33750712798     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.02.054     Document Type: Article

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