FEM assisted calibration of a MEMS-based dispensing system with integrated piezoresistive force sensors

Journal of Micromechanics and Microengineering

Volumn 18, Issue 1, 2008, Pages

  Lishchynska, Maryna ^a   Léchlé, Thierry ^b   Nicu, Liviu ^b  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CANTILEVER BEAMS; COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; FINITE ELEMENT METHOD; FORCE CONTROL; RESIDUAL STRESSES; SENSORS;

ELECTROMECHANICAL PROPERTIES; MULTIPHYSICAL SYSTEMS; PIEZORESISTIVE FORCE SENSORS;

MEMS;

EID: 41849142623     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/1/015010     Document Type: Article

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