Molecular dynamics simulations of near-surface modification of polystyrene: Bombardment with Ar+ and Ar+ /radical chemistries

Journal of Applied Physics

Volumn 104, Issue 3, 2008, Pages

  Vgh J J ^a   Nest, D ^a   Graves, D B ^a   Bruce, R ^b   Engelmann, S ^b   Kwon, T ^b,d   Phaneuf, R J ^b   Oehrlein, G S ^b   Long, B K ^c   Willson, C G ^c  

^a University of California   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^d MICRON TECHNOLOGY INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARBON; DYNAMICS; HYDROGEN; HYDROGEN BONDS; MOLECULAR DYNAMICS; NONMETALS; PLASMAS; POLYMERS; QUANTUM CHEMISTRY; SPUTTERING; VIBRATIONS (MECHANICAL);

BEAM SYSTEM; CARBON-CARBON BONDS; CARBON-RICH; ELLIPSOMETRIC DATA; FLUENCE; MD SIMULATIONS; MODIFIED LAYER; MOLECULAR-DYNAMICS SIMULATIONS; NEAR-SURFACE LAYERS; NEAR-SURFACE REGIONS; POLYMER FRAGMENTS; SPUTTER YIELDS; STEADY STATES; SURFACE MODIFICATIONS;

AMORPHOUS CARBON;

EID: 49749140435     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2963708     Document Type: Article

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