Etching rate and structural modification of polymer films during low energy ion irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 208, Issue 1-4, 2003, Pages 155-160

  Zaporojtchenko, V ^a   Zekonyte, J ^a   Erichsen, J ^a   Faupel, F ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

Glass transition; Ion irradiation effects; Polymers; X ray photoelectron spectra surface analysis

Indexed keywords

CROSSLINKING; ETCHING; GLASS TRANSITION; IRRADIATION; X RAY PHOTOELECTRON SPECTROSCOPY;

ION IRRADIATION EFFECTS;

PLASTIC FILMS;

EID: 0038487343     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00625-6     Document Type: Conference Paper

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