Molecular dynamics simulations of Ar +-induced transport of fluorine through fluorocarbon films

Applied Physics Letters

Volumn 84, Issue 7, 2004, Pages 1073-1075

  Humbird, David ^a   Graves, David B ^a   Hua, Xuefeng ^b   Oehrlein, Gottlieb S ^c  

^a University of California   (United States)

^b The Institute for Research in Electronics and Applied Physics   (United States)

^c UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOLTZMANN DISTRIBUTION; INTERATOMIC POTENTIAL;

ADSORPTION; ARGON; CHEMICAL BONDS; COMPUTER SIMULATION; DIELECTRIC FILMS; KINETIC ENERGY; MOLECULAR DYNAMICS; POSITIVE IONS; X RAY PHOTOELECTRON SPECTROSCOPY;

FLUOROCARBONS;

EID: 1542679157     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1644338     Document Type: Article

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