Issues in nanoimprint processes: The imprint pressure

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 7 B, 2005, Pages 5609-5616

  Scheer, Hella Christin ^a   Bogdanski, Nicolas ^a   Wissen, Matthias ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

Impact of pressure; Nanoimprint; Polystyrene; Shear rate effects

Indexed keywords

COMPUTER SIMULATION; MOLECULAR WEIGHT; SHEAR STRENGTH; VISCOSITY;

IMPACT OF PRESSURE; NANOIMPRINT; SHEAR RATE EFFECTS;

POLYSTYRENES;

EID: 29044433682     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.5609     Document Type: Article

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