Near-surface modification of polystyrene by Ar+: Molecular dynamics simulations and experimental validation

Applied Physics Letters

Volumn 91, Issue 23, 2007, Pages

  Vgh J J ^a   Nest, D ^a   Graves, D B ^a   Bruce, R ^b   Engelmann, S ^b   Kwon, T ^b   Phaneuf, R J ^b   Oehrlein, G S ^b   Long, B K ^c   Willson, C G ^c  

^a University of California   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEHYDROGENATION; ION BEAMS; MOLECULAR DYNAMICS; PHOTOELECTRON SPECTROSCOPY; POLYMERS; SPUTTER DEPOSITION;

DEHYDROGENATED DAMAGED LAYER; SPUTTER YIELD (SY);

POLYSTYRENES;

EID: 36849091325     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2821226     Document Type: Article

References (22)

1. V. Zaporojtchenko, J. Zekonyte, J. Erichsen, and F. Faupel, Nucl. Instrum. Methods Phys. Res. B 208, 155 (2003).
2. P. D. Davidse and L. I. Massel, J. Appl. Phys. 37, 574 (1966).
3. E. H. Lee, Nucl. Instrum. Methods Phys. Res. B 151, 29 (1999).
4. P. Groning, O. M. Kuttel, M. Collaud-Coen, G. Dietler, and L. Schlapbach, Appl. Surf. Sci. 89, 83 (1995).
5. J. Zekonyte, V. Zaporojtchenko, and F. Faupel, Nucl. Instrum. Methods Phys. Res. B 236, 241 (2005).
6. N. Negishi, H. Takesue, M. Sumiya, T. Yoshida, Y. Momonoi, and M. Izawa, J. Vac. Sci. Technol. B 25, 217 (2005).
7. H. Ito, Microlithography: Molecular Imprinting (Springer, Heidelberg, 2005), Vol. 172, p. 37.
8. J. Y. Cheng, C. A. Ross, V. Z. H. Chan, E. L. Thomas, R. G. H. Lammertink, and G. J. Vancso, Adv. Mater. (Weinheim, Ger.) 13, 1174 (2001).
9. H. C. Scheer, N. Bogdanski, and M. Wissen, Jpn. J. Appl. Phys., Part 1 44, 5609 (2005).
10. X. Hua, S. Engelmann, G. S. Oehrlein, P. Jiang, P. Lazzeri, E. Iacob, and M. Anderle, J. Vac. Sci. Technol. B 24, 1850 (2006).
11. I. K. Jang and S. B. Sinnott, J. Phys. Chem. B 108, 18993 (2004).
12. W. D. Hsu, I. Jang, and S. B. Sinnott, Chem. Mater. 18, 914 (2006).
13. A. Delcorte, P. Bertrand, and B. J. Garrison, J. Phys. Chem. B 105, 9474 (2001).
14. K. D. Krantzman, Z. Postawa, B. J. Garrison, N. Winograd, S. J. Stuart, and J. A. Harrison, Nucl. Instrum. Methods Phys. Res. B 180, 159 (2001).
15. J. J. V́gh, Ph.D. thesis, University of California, Berkeley, 2007.
16. CRC Handbook of Chemistry and Physics, 87th ed., edited by, D. R. Lide, (CRC Press, Boca Raton, FL, 2006), Sec. 15, p. 39.
17. E. Pargon, D. Nest, and D. B. Graves, J. Vac. Sci. Technol. B 25, 1236 (2007).
18. N. Fourches and G. Turban, Thin Solid Films 240, 28 (1994).
19. J. Zekonyte, J. Erichsen, V. Zaporojtchenko, and F. Faupel, Surf. Sci. 532, 1040 (2003).
20. M. C. Coen, R. Lehmann, P. Groening, and L. Schlapbach, Appl. Surf. Sci. 207, 276 (2003).
21. C. M. Chan, T. M. Ko, and H. Hiraoka, Surf. Sci. Rep. 24, 3 (1996).
22. F. D. Egitto and L. J. Matienzo, IBM J. Res. Dev. 38, 423 (1994).