A reliable method for the counting and control of single ions for single-dopant controlled devices

Nanotechnology

Volumn 19, Issue 34, 2008, Pages

  Shinada, T ^a   Kurosawa, T ^a   Nakayama, H ^a   Zhu, Y ^a   Hori, M ^a   Ohdomari, I ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION (COMPOSITION); DEVICE SIZES; RELIABLE METHOD; SINGLE IONS;

CONCENTRATION (PROCESS);

SILICON;

ARTICLE; ATOM; DEVICE; ELECTRIC POTENTIAL; PRIORITY JOURNAL; QUANTUM CHEMISTRY; SEMICONDUCTOR;

EID: 48249147011     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/34/345202     Document Type: Article

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